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Stable Isotopes (ISOTEC)

 Chemical Vapor Deposition Precursors

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CVD/ALD Precursors Packaged for Deposition Systems


  Aluminum (Al)   Arsenic (As)   Boron (B)
  Barium (Ba)   Beryllium (Be)   Bismuth (Bi)
  Carbon (C)   Calcium (Ca)   Cadmium (Cd)
  Cerium (Ce)   Cobalt (Co)   Chromium (Cr)
  Copper (Cu)   Dysprosium (Dy)   Erbium (Er)
  Europium (Eu)   Gadolinium (Gd)   Gallium (Ga)
  Germanium (Ge)   Hafnium (Hf)   Holmium (Ho)
  Indium (In)   Iridium (Ir)   Iron (Fe)
  Lanthanum (La)   Lithium (Li)   Lutetium (Lu)
  Magnesium (Mg)   Manganese (Mn)   Molybdenum (Mo)
  Neodymium (Nd)   Nickel (Ni)   Niobium (Nb)
  Osmium (Os)   Phosphorous (P)   Palladium (Pd)
  Praseodymium (Pr)   Platinum (Pt)   Rhodium (Rh)
  Ruthenium (Ru)   Rubidium (Rb)   Antimony (Sb)
  Samarium (Sm)   Scandium (Sc)   Selenium (Se)
  Tin (Sn)   Silicon (Si)   Strontium (Sr)
  Tantalum (Ta)   Terbium (Tb)   Thallium (Tl)
  Thulium (Tm)   Titanium (Ti)   Vanadium (V)
  Tungsten (W)   Yttrium (Y)   Ytterbium (Yt)
  Zinc (Zn)   Zirconium (Zr)  


Aluminum (Al)
Product #  Product Name Add to Cart
397288 Aluminum tris(2,2,6,6-tetramethyl-3,5-heptanedionate) 98%
257222 Trimethylaluminum 97%
256749 Diethylaluminum ethoxide 97%
257206 Triisobutylaluminum
J100047 Dimethylaluminum isopropoxide J100047, 99.99+ % as metals, ≥95%
469947 Tris(dimethylamido)aluminum(III)
Arsenic (As)
Product #  Product Name Add to Cart
492736 Triphenylarsine 99.99%
Boron (B)Back to Top
Product #  Product Name Add to Cart
T82201 Triphenylborane
463051 Diborane 99.99% (diborane only), 9-11% (balance hydrogen), 10% in hydrogen, electronic grade
463086 Boron trifluoride electronic grade, 99.99+ %
463094 Trimethylboron electronic grade, ≥98.35%
Barium (Ba)Back to Top
Product #  Product Name Add to Cart
403431 Barium hexafluoroacetylacetonate
495174 Barium bis(6,6,7,7,8,8,8-heptafluoro-2,2-dimethyl-3,5-octanedionate) 99.99%
Beryllium (Be)Back to Top
Product #  Product Name Add to Cart
522791 Beryllium acetylacetonate 97%
Bismuth (Bi)Back to Top
Product #  Product Name Add to Cart
373788 Bismuth(III) tris(2,2,6,6-tetramethyl-3,5-heptanedionate)
398950 Triphenylbismuth(III) 99%
485276 Tris(2-methoxyphenyl)bismuthine
485721 Bis(acetato-O)triphenylbismuth(V) 98%
Carbon (C)Back to Top
Product #  Product Name Add to Cart
463035 Methane electronic grade, 99.998+ %
Calcium (Ca)Back to Top
Product #  Product Name Add to Cart
362956 Calcium bis(2,2,6,6-tetramethyl-3,5-heptanedionate)
495158 Calcium bis(6,6,7,7,8,8,8,-heptafluoro-2,2-dimethyl-3,5-octanedionate) 99.9+ %
Cadmium (Cd)Back to Top
Product #  Product Name Add to Cart
517585 Cadmium acetylacetonate hydrate 99.9+ %
Cerium (Ce)Back to Top
Product #  Product Name Add to Cart
493570 Tris(cyclopentadienyl)cerium(III) 99.9%
547786 Tris[N,N-bis(trimethylsilyl)amide]cerium(III) 96%
510939 Tris(tetramethylcyclopentadienyl)cerium(III) 99.9%
Cobalt (Co)Back to Top
Product #  Product Name Add to Cart
339164 Bis(cyclopentadienyl)cobalt(II)
339695 Cobalt(II) hexafluoroacetylacetonate hydrate 98%
401781 Bis(pentamethylcyclopentadienyl)cobalt(II)
468215 Cobalt tris(2,2,6,6-tetramethyl-3,5-heptanedionate) 99%
494534 Cobalt(III) acetylacetonate 99.99+ %
510645 Bis(ethylcyclopentadienyl)cobalt(II)
Chromium (Cr)Back to Top
Product #  Product Name Add to Cart
468223 Chromium(III) tris(2,2,6,6-tetramethyl-3,5-heptanedionate)
475165 Bis(pentamethylcyclopentadienyl)chromium(II) 96%
495697 Chromium(III) trifluoroacetylacetonate 99.9+ %
574082 Chromium(III) acetylacetonate 99.99%
381004 Bis(cyclopentadienyl)chromium(II) 95%
510629 Bis(ethylcyclopentadienyl)chromium(II)
Copper (Cu)Back to Top
Product #  Product Name Add to Cart
101826 Copper(II) trifluoroacetylacetonate 97%
335193 Copper(II) hexafluoroacetylacetonate hydrate
345083 Copper bis(2,2,6,6-tetramethyl-3,5-heptanedionate) 99%
514365 Copper(II) acetylacetonate 99.99+ %
541761 Copper bis(6,6,7,7,8,8,8-Heptafluoro-2,2-dimethyl-3,5-octanedionate) ≥99.99%
Dysprosium (Dy)Back to Top
Product #  Product Name Add to Cart
481491 Dysprosium(III) acetylacetonate hydrate 99.9%
Erbium (Er)Back to Top
Product #  Product Name Add to Cart
434078 Erbium(III) tris(2,2,6,6-tetramethyl-3,5-heptanedionate) 99.9+ %
483990 Erbium(III) acetylacetonate hydrate 97%
491918 Tris(cyclopentadienyl)erbium(III) 99.99%
495980 Tris(isopropylcyclopentadienyl)erbium(III) 99.9%
495999 Tris(butylcyclopentadienyl)erbium(III) 99.9%
Europium (Eu)Back to Top
Product #  Product Name Add to Cart
393215 Europium(III) acetylacetonate hydrate
46145F
547816 Tris[N,N-bis(trimethylsilyl)amide]europium(III) 98%
511374 Tris(tetramethylcyclopentadienyl)europium(III) 99.9%
Gadolinium (Gd)Back to Top
Product #  Product Name Add to Cart
331716 Gadolinium(III) acetylacetonate hydrate 99.9%
492566 Tris(cyclopentadienyl)gadolinium(III) 99.9%
511366 Tris(tetramethylcyclopentadienyl)gadolinium(III) 99.9%
547824 Tris[N,N-Bis(trimethylsilyl)amide]gadolinium(III) 98%
Gallium (Ga)Back to Top
Product #  Product Name Add to Cart
393541 Gallium(III) acetylacetonate 99.99%
546534 Tris(dimethylamido)gallium(III) 98%
J100017 Triethylgallium J100017, ≥95%, 99.99+ % as metals
Germanium (Ge)Back to Top
Product #  Product Name Add to Cart
396354 Tetramethylgermanium 98%
401706 Tetraethylgermanium 99%
417106 Tris(trimethylsilyl)germanium hydride 97%
463027 Germane electronic grade, 99.997+ %
429961 Triethylgermanium hydride 98%
463078 Digermane 99.99% (excluding germane and trigermane), 9-11% (balance is hydrogen), 10% in hydrogen, electronic grade
Hafnium (Hf)Back to Top
Product #  Product Name Add to Cart
445541 Hafnium(IV) tert-butoxide 99.99% (purity excludes ~2000 ppm zirconium.)
455199 Tetrakis(dimethylamido)hafnium(IV) 99.99+ %
455202 Tetrakis(diethylamido)hafnium(IV) 99.99%
553123 Tetrakis(ethylmethylamido)hafnium(IV) 99.99+ %
557056 Dimethylbis(cyclopentadienyl)hafnium(IV)
493708 Bis(tert-butylcyclopentadienyl)dimethylhafnium(IV) 95%
J100005 Bis(trimethylsilyl)amidohafnium(IV) chloride 99.99+ % as metals
Holmium (Ho)Back to Top
Product #  Product Name Add to Cart
517631 Holmium(III) acetylacetonate hydrate 99.9+ %
554014 Tris(cyclopentadienyl)holmium(III) 99.9%
547840 Tris[N,N-bis(trimethylsilyl)amide]holmium(III) 97%
Indium (In)Back to Top
Product #  Product Name Add to Cart
I3300 Indium(III) acetylacetonate 99.99+ %
Iridium (Ir)Back to Top
Product #  Product Name Add to Cart
333352 Iridium(III) acetylacetonate 97%
429155 (Acetylacetonato)(1,5-cyclooctadiene)iridium(I)
Iron (Fe)Back to Top
Product #  Product Name Add to Cart
378542 Bis(pentamethylcyclopentadienyl)iron(II) 97%
413402 Iron(II) acetylacetonate 99.95%
468207 Iron(III) tris(2,2,6,6-tetramethyl-3,5-heptanedionate)
517003 Iron(III) acetylacetonate 99.9+ %
Lanthanum (La)Back to Top
Product #  Product Name Add to Cart
493597 Tris(cyclopentadienyl)lanthanum(III) 99.9%
513180 Tris(tetramethylcyclopentadienyl)lanthanum(III) 99.9%
325759 Lanthanum(III) acetylacetonate hydrate
547778 Tris[N,N-bis(trimethylsilyl)amide]lanthanum(III) 98%
413046 Lithium acetylacetonate 97%
Lithium (Li)Back to Top
Product #  Product Name Add to Cart
530743 Lithium bis(dimethylethylsilyl)amide 99.99%
Lutetium (Lu)Back to Top
Product #  Product Name Add to Cart
517658 Lutetium(III) acetylacetonate hydrate 99.9+ %
547883 Tris[N,N-bis(trimethylsilyl)amide]lutetium(III) 98%
Magnesium (Mg)Back to Top
Product #  Product Name Add to Cart
415707 Magnesium bis(2,2,6,6-tetramethyl-3,5-heptanedionate) hydrate 97%
479446 Bis(ethylcyclopentadienyl)magnesium 97%
J100042 Bis(cyclopentadienyl)magnesium(II) ≥95%, 99.99+ % as metals (excludes ~300ppm Al)
512540 Bis(pentamethylcyclopentadienyl)magnesium electronic grade, 99.999%
Manganese (Mn)Back to Top
Product #  Product Name Add to Cart
415405 Bis(pentamethylcyclopentadienyl)manganese(II)
493716 Bis(cyclopentadienyl)manganese(II) 97%
510637 Bis(ethylcyclopentadienyl)manganese(II)
562424 Bis(tetramethylcyclopentadienyl)manganese(II)
Molybdenum (Mo)Back to Top
Product #  Product Name Add to Cart
577766 Molybdenumhexacarbonyl 99.9+ %
117609 Cyclopentadienylmolybdenum(II) tricarbonyl, dimer 98%
524166 (Propylcyclopentadienyl)molybdenum(I) tricarbonyl dimer
Neodymium (Nd)Back to Top
Product #  Product Name Add to Cart
496014 Tris(isopropylcyclopentadienyl)neodymium(III) 99.9%
434043 Neodymium(III) tris(2,2,6,6-tetramethyl-3,5-heptanedionate) 98%
547794 Tris[N,N-bis(trimethylsilyl)amide]neodymium(III) 97%
Nickel (Ni)Back to Top
Product #  Product Name Add to Cart
283657 Nickel(II) acetylacetonate 95%
339709 Nickel(II) hexafluoroacetylacetonate hydrate 98%
403393 Nickel(II) bis(2,2,6,6-tetramethyl-3,5-heptanedionate) 97%
510483 Bis(ethylcyclopentadienyl)nickel(II)
N7524 Bis(cyclopentadienyl)nickel(II)
524271 Allyl(cyclopentadienyl)nickel(II) 97%
Niobium (Nb)Back to Top
Product #  Product Name Add to Cart
J100036 Niobium(V) ethoxide electronic grade, 99.999%
260924 Bis(cyclopentadienyl)niobium(IV) dichloride 95%
Osmium (Os)Back to Top
Product #  Product Name Add to Cart
249742 Triosmium dodecacarbonyl 98%
Phosphorous (P)Back to Top
Product #  Product Name Add to Cart
295647 Phosphine electronic grade, 99.9995+ %
431249 Trimethyl phosphite 99.999+ % (metals basis purity)
262099 Phosphorus(V) oxychloride 99.999%
Palladium (Pd)Back to Top
Product #  Product Name Add to Cart
209015 Palladium(II) acetylacetonate 99%
401471 Palladium(II) hexafluoroacetylacetonate
Praseodymium (Pr)Back to Top
Product #  Product Name Add to Cart
547808 Tris[N,N-bis(trimethylsilyl)amide]praseodymium(III) 98%
517674 Praseodymium(III) acetylacetonate hydrate 99.9+ %
475173 Tris(cyclopentadienyl)praseodymium(III) 99.9%
496022 Tris(isopropylcyclopentadienyl)praseodymium(III) 99.9%
Platinum (Pt)Back to Top
Product #  Product Name Add to Cart
523038 Platinum(II) acetylacetonate 99.99%
645605 Trimethyl(methylcyclopentadienyl)platinum(IV) 98%
Rhodium (Rh)Back to Top
Product #  Product Name Add to Cart
282774 Rhodium(III) acetylacetonate 97%
288101 (Acetylacetonato)dicarbonylrhodium(I) 98%
335029 (Acetylacetonato)(1,5-cyclooctadiene)rhodium(I) 99%
Ruthenium (Ru)Back to Top
Product #  Product Name Add to Cart
245011 Triruthenium dodecacarbonyl 99%
262455 Bis(cyclopentadienyl)ruthenium(II) 97%
442062 Bis(pentamethylcyclopentadienyl)ruthenium(II) 97%
648663 Bis(ethylcyclopentadienyl)ruthenium(II)
Rubidium (Rb)Back to Top
Product #  Product Name Add to Cart
392618 Rubidium acetylacetonate
Antimony (Sb)Back to Top
Product #  Product Name Add to Cart
T81809 Triphenylantimony(III) 99%
553972 Tris(dimethylamido)antimony(III) 99.99%
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