Order Center
 
Chemistry

Chemical Synthesis
Drug Discovery
Materials Science
New Products
Nanotechnology
Biocompatible/Biodegradable
Display and Optoelectronics
Energy Source Materials
Metals and Ceramic Science
Micro and Nanoelectronics
NanoThinks
Alicyclic Monomers
CVD & ALD Precursors
Electronic Chemicals
Electronic Materials
Ferrocenes
Fl-Containing Monomers
Inks
Lithography
Lithography Materials
Nanopatterning
Photoacid Generators
Polyamic Acids
SAMS Polyelectrolytes
Silane Coupling Agents
Sol-Gel Processing
Stamps for Lithography
Substrates
Tutorial
Nanomaterials
Polymer Science
Key Resources
Stable Isotopes (ISOTEC)

 CVD/ALD Precursors Packaged for Deposition Systems

Materials Science
 

Packaged in steel cylinders designed for the Cambridge Nanotech Inc. ALD system

Product #  Product Name Formula Physical State Add to Cart
679798 Bis(ethylcyclopentadienyl)ruthenium(II)  Ru(C5H4C2H5)2 Liquid
668885 Bis(tert-butylimino)bis(dimethylamino)tungsten(VI) ((CH3)3CN)2W(N(CH3)2)2 Liquid, air-sensitive
668729 Diethylzinc Zn(C2H5)2 Liquid, pyrophoric
663301 Trimethylaluminum Al(CH3)3 Liquid, pyrophoric
669008 Tetrakis(dimethylamido)titanium(IV) Ti[N(CH3)2]4 Liquid, air-sensitive
687502 Titanium(IV) isopropoxide Ti(OPr-i)4 Liquid, air-sensitive
669016 Tetrakis(dimethylamido)zirconium(IV) Zr[N(CH3)2]4 Solid, air-sensitive
688509 Silicone tetrachloride SiCl4 Liquid, moisture-sensitive
666610 Tetrakis(dimethylamido)hafnium(IV) Hf[N(CH3)2]4 Solid, air-sensitive
668990 Tris(diethylamido)(tert-butylimido)tantalum (CH3)3CN=Ta(N(C2H5)2)3 Liquid, air-sensitive

Site Use Terms Terms and Conditions of Sale Privacy Business Development Contact Us
Copyrights © 2008 Sigma-Aldrich Co. All Rights Reserved.
Reproduction of any materials from the site is strictly forbidden without permission.
Sigma-Aldrich brand products are sold exclusively through Sigma-Aldrich, Inc.