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Microelectrical-mechanical systems (MEMS) integrate the technology of nanoelectronics developed for the integrated circuit with the fabrication of microscale mechanical components in one single “system-on-a-chip” device. MEMS technology has immediate uses in biotechnology, transportation safety and communications. Like the computer chip, MEMS features are being scaled to the nano regime, or NEMS.
Several fabrication techniques are used to integrate the circuitry, sensors and actuators and mechanical components. Deposition processes, lithography, sol-gel techniques are used in concert to create these devices.
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