EpiSensor™

SAFC Hitech - Compound Semiconductor
 
 EpiSensor level indication system for semiconductor precursors

The EpiSensor is an accurate, robust level sensor system capable of indicating liquid metalorganic precursor weight present in a standard source container under static and active bubbler/ampoule conditions.

The specially-designed probe fits neatly into the filler port of any bubbler/ampoule and when in place becomes an integral part of the bubbler/ampoule itself.