EpiFill™

The ability to constantly replenish the chemicals in the EpiFill system results in decreased equipment downtime, minimized human traffic in clean-rooms, reduced safety hazards and higher overall throughput.

Applications include
	Liquid source delivery for production environment deposition systems employed to fabricate semiconductor devices
	TMA/TMG delivery in MOVPE/MOCVD/ALD or solar cells, HBLEDSs
	TMG delivery for MOVPE HBTs
	TMA delivery for ALD high-k Al2O3
	HfD-04/TEMAH delivery for ALD high-k HfO2 layers