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The frequency of container change out can be minimised by moving to larger batch sizes but maintaining temperature control becomes difficult using conventional heater baths. Also bubbler size is limited to that of the installed bath. The new OM700 bubbler overcomes these issues with its own independent heating jacket and thermal control system to allow an increased volume to accommodate over 9L of metal alkyl.
Flux stability over a range of operating temperatures (-10 to +30C) ensures processes can be run at full capacity and the increased time between bubbler change out maximises efficiency thus reducing operational costs without compromising ultra high performance levels.
Specifically designed for pyrophoric, highly sensitive compounds the OM700 system is supported by a team of experts focussed on safe handling of these materials without contamination to consistently meet and surpass semiconductor quality standards.
| Compound |
Fill Level |
| TMG |
11kg |
| TMA |
7kg |
| TEG |
10kg |
| DMZ |
13kg |
| DEZ |
11kg |
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