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463043 Aldrich

Disilane

electronic grade

Purchase

Properties

Related Categories CVD and ALD Precursors by Metal, Chemical Synthesis, Gases, Materials Science, Micro/NanoElectronics,
grade   electronic grade
form   gas
impurities   ≤50 ppm Higher silanes
  <0.2 ppm Chlorosilanes
  <1 ppm Argon (Ar) + Oxygen (O2)
  <1 ppm Carbon dioxide (CO2)
  <1 ppm Nitrogen (N2)
  <1 ppm THC
  <1 ppm Water
  <5 ppm Siloxanes
bp   −14.5 °C(lit.)
mp   −132.6 °C(lit.)
transition temp   critical temperature 150.9 °C

Description

Features and Benefits

Disilane is used for the deposition of amorphous silicon, epitaxial silicon and silicon based dielectrics via rapid low-temperature chemical vapor depsition (LTCVD).2 Disilane is also used in the epitaxial growth of SiGe films by molecular beam epitaxy (MBE) in conjunction with solid sources of germanium.3 Precursor for the rapid, low temperature deposition of epitaxial silicon and silicon-based dielectrics.4

General description

Atomic number of base material: 14 Silicon

Packaging

20 g in ss cylinder

Application

Precursor for the rapid, low temperature deposition of epitaxial silicon and silicon-based dielectrics.1

Recommended products

Stainless steel regulators Z527416 or Z527424 are recommended.

Price and Availability

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Safety & Documentation

Safety Information

Signal word 
Danger
Hazard Codes (Europe) 
Risk Statements (Europe) 
Safety Statements (Europe) 
16-24-26-36/37/39
RIDADR 
UN 3161 2.1
WGK Germany 
3
Flash Point(F) 
<50 °F
Flash Point(C) 
<10 °C

Protocols & Articles

Articles

High Purity Deposition Gases

High Purity CVD Gases are used in the deposition of amorphous and epitaxial silicon, SiGe alloys, and dielectrics as well as the manufacture of integrated circuits and photovolatics. The gases are al...
Chemfiles Volume 4 Article 3
Keywords: Catalog, Chemical vapor deposition, Deposition

High Purity Metalorganic Precursors for CPV Device Fabrication

Thin film photovoltaic devices have become increasingly important in efficiently harnessing solar energy to meet consumer demand. Conventional crystalline silicon solar cells have demonstrated remark...
Simon Rushworth
Material Matters Volume 5 Article 4
Keywords: Absorption, Capabilities, Chemical vapor deposition, Degradations, Deposition, Mass spectrometry, Nuclear magnetic resonance spectroscopy, Protocols, Purification, Semiconductor, Solar cells, Spectroscopy, Tissue microarrays, Tools, Usage, Vaporization

Peer-Reviewed Papers

References

Set your institution to view full text papers.

1. J. Appl. Physiol. 81, 205, (1997)

2. Lin, H.-Y. et. al. Solid-State Electron 39, 1731, (1996)

3. Wado, H. et. al. J. Cryst. Growth 169, 457, (1996)

4. Huang, G. W. et. al. J. Appl. Physiol. 81, 205, (1997)

Merck 14,3356

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