725528
Aldrich
Tetrakis(ethylmethylamido)
Tetrakis(ethylmethylamido)zirconium(IV)
packaged for use in deposition systems
DOWNLOAD MSDS (PDF)Synonym:
TEMAZ,
Tetrakis(ethylmethylamino)
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CAS Number 175923-04-3
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Linear Formula Zr(NCH3C2H5)4
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Molecular Weight 323.63
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MDL number MFCD03427131
Properties
| Related Categories | 40: Zirconium, CVD and ALD Precursors Packaged for Deposition Systems, CVD and ALD Precursors by Metal, Catalysis and Inorganic Chemistry, Chemical Synthesis, |
| form | liquid |
| bp | 81 °C/0.1 mmHg(lit.) |
| density | 1.049 g/mL at 25 °C(lit.) |
Description
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General description
Atomic number of base material: 40 Zirconium
Packaging
10 g in ss cylinder
Protocols & Applications
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