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295647 Aldrich

Phosphine

electronic grade, ≥99.9995%

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Properties

Related Categories Analytical Standards, Analytical/Chromatography, CVD and ALD Precursors by Metal, Catalysis and Inorganic Chemistry, Chemical Synthesis,
grade   electronic grade
vapor density   1.15 (vs air)
InChI Key   XYFCBTPGUUZFHI-UHFFFAOYSA-N
assay   ≥99.9995%
form   gas
impurities   <1 ppm Argon (Ar)
  <1 ppm Arsine (AsH3)
  <1 ppm Carbon dioxide (CO2)
  <1 ppm Carbon monoxide (CO)
  <1 ppm Methane (CH4)
  <1 ppm Nitrogen (N2)
  <1 ppm Oxygen (O2)
  <1 ppm Water (H2O)
bp   −87.5 °C(lit.)
transition temp   critical temperature 51.3 °C

Description

Application

Phosphine is used primarily in the manufacture of III-IV semiconductor materials by OMCVD and as a dopant in crystalline and amorphous silicon.

Precursor to III-V semiconductor thin films. Also useful as a dopant for crystalline and amorphous silicon.

General description

Atomic number of base material: 15 Phosphorus

Packaging

10, 50 g in stainless steel cylinder

Recommended products

Stainless steel regulators Z527416 or Z527424 are recommended.

Price and Availability

Safety & Documentation

Safety Information

Signal word 
Danger
Hazard statements 
Precautionary statements 
RIDADR 
UN 2199 2.1(2.3)
WGK Germany 
2
RTECS 
SY7525000

Documents

Certificate of Analysis

Certificate of Origin

Protocols & Articles

Articles

High Purity Deposition Gases

High Purity CVD Gases are used in the deposition of amorphous and epitaxial silicon, SiGe alloys, and dielectrics as well as the manufacture of integrated circuits and photovolatics. The gases are al...
Chemfiles Volume 4 Article 3
Keywords: Catalog, Chemical vapor deposition, Deposition

High Purity Metalorganic Precursors for CPV Device Fabrication

Thin film photovoltaic devices have become increasingly important in efficiently harnessing solar energy to meet consumer demand. Conventional crystalline silicon solar cells have demonstrated remark...
Ravi Kanjolia
Material Matters Volume 5 Article 4
Keywords: Absorption, Chemical vapor deposition, Degradations, Deposition, Mass spectrometry, Nuclear magnetic resonance spectroscopy, Purification, Semiconductor, Solar cells, Spectroscopy, Tissue microarrays, Vaporization

Peer-Reviewed Papers
15

References

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