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333859 Aldrich

Tetraethyl orthosilicate

99.999% trace metals basis

Synonym: Orthosilicic acid tetraethyl ester, Silicon tetraethoxide, TEOS, Tetraethoxysilane, Tetraethoxysilicon(IV), Tetraethyl silicate



Related Categories Chemical Synthesis, Materials Science, Micro/NanoElectronics, Organometallic Reagents, Organosilicon,
vapor density   7.2 (vs air)
vapor pressure   <1 mmHg ( 20 °C)
assay   99.999% trace metals basis
form   liquid
refractive index   n20/D 1.382(lit.)
bp   168 °C(lit.)
density   0.933 g/mL at 20 °C(lit.)



Commonly used as a precursor to prepare xerogel1,2

Will interact with dodecylamine in the formation of intercalation compounds of H+-magadiite and used in a study of mixed-metal bioactive glasses.


25, 100 mL in glass bottle

Price and Availability

Suggested Laboratory Gloves

Laboratory GlovesThis substance has been tested against several types of hand protection for CE compliance. Click below to find the recommended gloves for handling this product.

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Tetraethyl orthosilicate

≥99.0% (GC)

Tetraethyl orthosilicate

reagent grade, 98%

Tetraethyl orthosilicate

packaged for use in deposition systems

Safety & Documentation

Safety Information

Signal word 
Hazard statements 
UN 1292 3 / PGIII
WGK Germany 
Flash Point(F) 
113 °F
Flash Point(C) 
45 °C

Protocols & Articles


Bio-Inspired “Green” Synthesis of Nanomaterials and their Applications

Dr. Siddharth V. Patwardhan Department of Chemical and Process Engineering University of Strathclyde, 75 Montrose Street Glasgow G1 1XJ, UK Email: Siddharth.Patwardhan@strath.ac.uk
Keywords: Adsorption, Agriculture, Apoptosis, Cancer, Catalysis, Condensations, Cosmetics, Deposition, Environmental, Enzyme activity, Green chemistry, Hydration reaction, Immobilization, Microwave synthesis, Nanomaterials, Pharmaceutical, Precipitation, Reductions, Separation, Sol-gel, Solvents

Chemistry in Flames: From Oxide to Salt and Metal Nanoparticles

Samuel C. Halim, Robert N. Grass, Wendelin J. Stark* Institute of Chemical and Bioengineering Department of Chemistry and Applied Biosciences ETH Zurich, Switzerland *Email: wendelin.stark@chem.ethz....
Keywords: Biomaterials, Building blocks, Catalysis, Chemical reactions, Chromatin immunoprecipitation, Combustion, Deposition, Metabolism, Nanomaterials, Oxidations

Development of a Hermetic Barrier Using Vinyl Triethoxysilane (VTEOS) and Sol-Gel Processing

Humidity barriers are an essential part of microelectronics, micro-electromechanical systems (MEMS) and displays using organic-light emitting diodes (OLEDs). These barriers are required to have low p...
Ariel Jackson, Dr. Andrei Jitianu, Professor Lisa C. Klein
Material Matters 2006, 1.3, 11.
Keywords: Applications, Condensations, Electronics, Infrared spectroscopy, Materials Science, Microelectronics, Polymerization reactions, Radical polymerization, Sol-gel, Spectra, Spectroscopy

From Form to Function: Molding Porous Materials in Three Dimensions by Colloidal Crystal Templating

Methods of structuring materials with submicrometer features in two dimensions have become highly sophisticated. For example, lithographic methods are now capable of carving out several hundred milli...
Melissa A. Fierke, Fan Li, and Prof. Andreas Stein
Material Matters 2008, 3.1, 10.
Keywords: Applications, Centrifugation, Chemical vapor deposition, Combustion, Deposition, Diffraction, Diffusion, Emulsion polymerization, Filtration, Methods, Photographs, Polymerization reactions, Precipitation, Semiconductor, Sol-gel

High Purity Metalorganic Precursors for CPV Device Fabrication

Thin film photovoltaic devices have become increasingly important in efficiently harnessing solar energy to meet consumer demand. Conventional crystalline silicon solar cells have demonstrated remark...
Simon Rushworth
Material Matters Volume 5 Article 4
Keywords: Absorption, Capabilities, Chemical vapor deposition, Degradations, Deposition, Mass spectrometry, Nuclear magnetic resonance spectroscopy, Protocols, Purification, Semiconductor, Solar cells, Spectroscopy, Tissue microarrays, Tools, Usage, Vaporization

Mesoporous Oxides and Their Applications to Hydrogen Storage

Solid-state hydrogen storage is attractive from a technological point of view, but has encountered tremendous challenges in terms of practical storage capacity and kinetics.1-3 Hydrogen sorption, whe...
Arlon J. Hunt1, Karl Gross2, Samuel S. Mao1
Material Matters Volume 4 Article 2
Keywords: Addition reactions, Adsorption, Applications, Catalysis, Chemical vapor deposition, Condensations, Deposition, Diffusion, Insecticides, Magnetic resonance spectroscopy, Material Matters, Methods, Microscopy, Nanomaterials, Photographs, Scanning electron microscopy, Size-exclusion chromatography, Sol-gel, Substitutions, Transmission electron microscopy

Recent Developments in Silicon Anode Materials for High Performance Lithium-Ion Batteries

Xuefeng Song,1* Xiaobing Wang,2 Zhuang Sun,1 Peng Zhang,1 and Lian Gao1 1State Key Laboratory for Metallic Matrix Composite Materials, School of Materials Science and Engineering, Shanghai Jiao Tong ...
Keywords: Automotive, Deposition, Diffusion, Electrochemical reactions, Environmental, Lithiations, Materials Science, Microscopy, Nanomaterials, Nanotubes, Polymerization reactions, Reductions, Scanning electron microscopy, Transmission electron microscopy

Sol-Gel Science for Ceramic Materials

Silicon-based research has drawn much attention in recent years with targeted organizations such as the International Sol-Gel Society hosting workshops,1 and the Sol-Gel Gateway2 hosting a compendium...
Dr. Sandra Kay Young
Material Matters 2006, 1.3, 8.
Keywords: Applications, Articles, Ceramics, Chemfiles, Condensations, Deposition, Evaporation, Hydrosilylations, Infrared spectroscopy, Ligands, Newsletters, Nuclear magnetic resonance spectroscopy, Polymerization reactions, Sol-gel, Spectra, Type

Synthesis of Melting Gels Using Mono-Substituted and Di-Substituted Alkoxysiloxanes

Hybrid organic-inorganic sol-gel materials containing silica were first called “ORMOSILs” in 1984.1 Since then, the number of hybrid organicinorganic combinations has increased rapidly.2 Hybrid mater...
Lisa C. Klein and Andrei Jitianu
Material Matters, Volume 7, Number 2, 8–14
Keywords: Absorption, Adhesion, Calorimetry, Combustion, Condensations, Deposition, Exothermic, Filtration, Materials Science, Melting, Oxidations, Polymerization reactions, Purification, Semiconductor, Sol-gel, Solar cells, Solvents, Spin coating, Substitutions, Thermal analysis

Synthesis of Melting Gels Using Mono-Substituted and Di-Substituted Alkoxysiloxanes

Lisa C. Klein1* and Andrei Jitianu2 1Rutgers University Department of Materials Science and Engineering 607 Taylor Road, Piscataway, NJ 08854. 2Lehman College, City University of New York Department ...
Keywords: Absorption, Adhesion, Calorimetry, Combustion, Condensations, Deposition, Exothermic, Filtration, Materials Science, Melting, Oxidations, Polymerization reactions, Purification, Semiconductor, Sol-gel, Solar cells, Solvents, Spin coating, Substitutions, Thermal analysis

Vistas in Current Magnetic Materials Research

Magnetism and magnetic materials have been of scientific interest for over 1,000 years. More recently, fundamental investigations have focused on exploring the various types of magnetic materials and...
Keywords: Automotive, Ceramics, Detection methods, Electronics, Materials Science, Nanomaterials, Precipitation, Semiconductor

Peer-Reviewed Papers


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1. Skokankova, J.; et al. Mater. Sci. Eng., C 26 (2-3), 208, (2006)

2. Abdelghani, A.; et al. Mater. Sci. Eng., C 26 (2-3), 542, (2006)

Synthesis of nano-bowls with a Janus template. Mo AH, Landon PB, Emerson CD, et al. Nanoscale 7(2), 771-5, (2015)


Development of hermetic barrier using vinyl triethoxysilane (VTEOS) and sol-gel processing Jackson A, et al. Material Matters 1, 11-12, (2006)

Fabrication of tunable silica-mineralized nanotubes using flagella as bio-templates Jo W, et al. Nanotechnology 23(5), (2012)

Mesoporous oxides and their applications to hydrogen storage. Hunt AJ, et al. Material Matters 4(2), 47-54, (2009)

Rod-Shaped Assemblies of FePt-PtTe2 through Dynamic Templating Yan Q, et al. Advanced Mat. 19(24), 4358-4363, (2007)

Sol-Gel Science for Ceramic Materials Young SK, et al. Material Matters, (2006)

Deposition of thick TEOS PECVD silicon oxide layers for integrated optical waveguide applications Bulla DAP and Morimoto NI Thin Solid Films 334, 60-64, (1998)

Kwon, O-Y. et al. Chem. Mater. 12, 1273, (2000)

Pérez-Pariente, J. et al. Chem. Mater. 12, 750, (2000)

Fabrication of mesoporous silica shells on solid silica spheres using anionic surfactants and their potential application in controlling drug release. El-Toni AM, Khan A, Ibrahim MA, et al. Molecules 17(11), 13199-210, (2012)


Preparation and antibacterial activities of hollow silica-Ag spheres. Lin L, Zhang H, Cui H, et al. Colloids Surf. B Biointerfaces 101, 97-100, (2013)


Solution-processable molecular cage micropores for hierarchically porous materials. Hasell T, Zhang H, and Cooper AI Adv. Mater. 24(42), 5732-7, (2012)


On the synergistic catalytic properties of bimetallic mesoporous materials containing aluminum and zirconium: the Prins cyclisation of citronellal. Selvedin Telalović et al Chemistry 17, 2077-88, (2011)


Novel sol-gel hybrid methyltrimethoxysilane-tetraethoxysilane as solid phase extraction sorbent for organophosphorus pesticides. Wan Ibrahim WA, Veloo KV, and Sanagi MM J. Chromatogr. A. 1229, 55-62, (2012)


Anti-biofilm efficacy of nitric oxide-releasing silica nanoparticles. Evan M. Hetrick et al Biomaterials 30, 2782-9, (2009)


Enhanced cellular uptake of aminosilane-coated superparamagnetic iron oxide nanoparticles in mammalian cell lines. Zhu XM, Wang YX, Leung KC, et al. Int. J. Nanomedicine 7, 953-64, (2012)


Subtle cytotoxicity and genotoxicity differences in superparamagnetic iron oxide nanoparticles coated with various functional groups. Hong SC, Lee JH, Lee J, et al. Int. J. Nanomedicine 6, 3219-31, (2011)


An inorganic-organic hybrid optical sensor for heavy metal ion detection based on immobilizing 4-(2-pyridylazo)-resorcinol on functionalized HMS. Liu T, Li G, Zhang N, et al. J. Hazard. Mater. 201-202, 155-61, (2012)


Preparation of novel magnetic fluorescent nanoparticles using amino acids. Ebrahiminezhad A, Ghasemi Y, Rasoul-Amini S, et al. Colloids Surf. B Biointerfaces 102, 534-9, (2013)


Preparation of mesoporous submicrometer silica capsules via an interfacial sol-gel process in inverse miniemulsion. Cao Z, Dong L, Li L, et al. Langmuir 28(17), 7023-32, (2012)


Biocompatible magnetite nanoparticles with varying silica-coating layer for use in biomedicine: physicochemical and magnetic properties, and cellular compatibility. Singh RK, Kim TH, Patel KD, et al. J. Biomed. Mater. Res. A 100(7), 1734-42, (2012)


Monitoring the performance of innovative and traditional biocides mixed with consolidants and water-repellents for the prevention of biological growth on stone. Pinna D, Salvadori B, and Galeotti M Sci. Total Environ. 423, 132-41, (2012)


Preparation of mesoporous/macroporous materials in highly concentrated emulsions based on cubic phases by a single-step method. Esquena J, Nestor J, Vílchez A, et al. Langmuir 28(33), 12334-40, (2012)


Producing surfactant-synthesized nanomaterials in situ on a building substrate, without volatile organic compounds. Illescas JF and Mosquera MJ ACS Appl. Mater. Interfaces 4(8), 4259-69, (2012)


Polysaccharides as a source of advanced materials: cellulose hollow microspheres for drug delivery in cancer therapy. Metaxa AF, Efthimiadou EK, Boukos N, et al. J. Colloid. Interface Sci. 384(1), 198-206, (2012)


Silicone fouling-release coatings: effects of the molecular weight of poly(dimethylsiloxane) and tetraethyl orthosilicate on the magnitude of pseudobarnacle adhesion strength. Kaffashi A, Jannesari A, and Ranjbar Z Biofouling 28(7), 729-41, (2012)


Sporocidic properties of poly(vinyl alcohol)/silver nanoparticles/TEOS thin hybrid films. Pencheva D, Bryaskova R, Lad U, et al. J. Biomed. Nanotechnol. 8(3), 465-72, (2012)


Perylenediimide functionalized bridged-siloxane nanoparticles for bulk heterojunction organic photovoltaics. Rathnayake H, Binion J, McKee A, et al. Nanoscale 4(15), 4631-40, (2012)


Diffusion of dissolved ions from wet silica sol-gel monoliths: implications for biological encapsulation. Dickson DJ, Lassetter B, Glassy B, et al. Colloids Surf. B Biointerfaces 102, 611-9, (2013)


Fabrication of tunable silica-mineralized nanotubes using flagella as bio-templates. Jo W, Freedman KJ, Yi DK, et al. Nanotechnology 23(5), 055601, (2012)


Hierarchical nested wrinkles on silica-polymer hybrid films: stimuli-responsive micro periodic surface architectures. Tokudome Y, Suzuki K, Kitanaga T, et al. Sci. Rep. 2, 683, (2012)


New antifouling silica hydrogel. Beltrán-Osuna ÁA, Cao B, Cheng G, et al. Langmuir 28(25), 9700-6, (2012)


Functionalization of bolalipid nanofibers by silicification and subsequent one-dimensional fixation of gold nanoparticles. Drescher S, Hempel G, Binder WH, et al. Langmuir 28(31), 11615-24, (2012)


Controllable preparation and formation mechanism of monodispersed silica particles with binary sizes. Zhao S, Xu D, Ma H, et al. J. Colloid. Interface Sci. 388(1), 40-6, (2012)


Fabrication of nanogel core-silica shell and hollow silica nanoparticles via an interfacial sol-gel process triggered by transition-metal salt in inverse systems. Cao Z, Yang L, Yan Y, et al. J. Colloid. Interface Sci. 406, 139-47, (2013)


Tetraethylorthosilicate as molecular precursor to the formation of amorphous silica networks. A DFT-SCRF study of the base catalyzed hydrolysis. Fernandez L, Tuñón I, Latorre J, et al. J. Mol. Model. 18(7), 3301-10, (2012)


ABC copolymer silicone surfactant templating for biomimetic silicification. Sun B, Guo C, Yao Y, et al. J. Colloid. Interface Sci. 378(1), 93-9, (2012)


Merck 14,3851

Beil. 1,IV,1360

Aldrich MSDS 1, 1662:B / Corp MSDS 1 (2), 3262:A / FT-IR 1 (2), 1092:D / FT-IR 2 (3), 4379:A / FT-NMR 1 (3), 668:B / IR-Spectra (3), 1536:H / IR-Spectra (2), 1314:H / NMR-Reference 2 (2), 988:A / RegBook 1 (2), 2973:D / Sigma FT-IR 1 (2), 981:C / Structure Index 1, 470:D:8 / Vapor Phase 3, 1647:D

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