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333859 Aldrich

Tetraethyl orthosilicate

99.999% trace metals basis

Synonym: Orthosilicic acid tetraethyl ester, Silicon tetraethoxide, TEOS, Tetraethoxysilane, Tetraethoxysilicon(IV), Tetraethyl silicate



Related Categories Chemical Synthesis, Materials Science, Micro/NanoElectronics, Organometallic Reagents, Organosilicon,
vapor density   7.2 (vs air)
vapor pressure   <1 mmHg ( 20 °C)
assay   99.999% trace metals basis
form   liquid
refractive index   n20/D 1.382(lit.)
bp   168 °C(lit.)
density   0.933 g/mL at 20 °C(lit.)



Commonly used as a precursor to prepare xerogel1,2

Will interact with dodecylamine in the formation of intercalation compounds of H+-magadiite and used in a study of mixed-metal bioactive glasses.


25, 100 mL in glass bottle

Price and Availability

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Tetraethyl orthosilicate

≥99.0% (GC)

Tetraethyl orthosilicate

reagent grade, 98%

Tetraethyl orthosilicate

packaged for use in deposition systems

Safety & Documentation

Safety Information

Signal word 
Hazard statements 
UN 1292 3 / PGIII
WGK Germany 
Flash Point(F) 
113 °F
Flash Point(C) 
45 °C
Protocols & Articles


Bio-Inspired “Green” Synthesis of Nanomaterials and their Applications

Dr. Siddharth V. Patwardhan Department of Chemical and Process Engineering University of Strathclyde, 75 Montrose Street Glasgow G1 1XJ, UK Email: Siddharth.Patwardhan@strath.ac.uk
Keywords: Adsorption, Agriculture, Apoptosis, Cancer, Catalysis, Condensations, Cosmetics, Deposition, Environmental, Enzyme activity, Green chemistry, Hydration reaction, Immobilization, Microwave synthesis, Nanomaterials, Pharmaceutical, Precipitation, Reductions, Separation, Sol-gel, Solvents

Development of a Hermetic Barrier Using Vinyl Triethoxysilane (VTEOS) and Sol-Gel Processing

Humidity barriers are an essential part of microelectronics, micro-electromechanical systems (MEMS) and displays using organic-light emitting diodes (OLEDs). These barriers are required to have low p...
Ariel Jackson, Dr. Andrei Jitianu, Professor Lisa C. Klein
Material Matters 2006, 1.3, 11.
Keywords: Applications, Condensations, Electronics, Infrared spectroscopy, Materials Science, Microelectronics, Polymerization reactions, Radical polymerization, Sol-gel, Spectra, Spectroscopy

From Form to Function: Molding Porous Materials in Three Dimensions by Colloidal Crystal Templating

Methods of structuring materials with submicrometer features in two dimensions have become highly sophisticated. For example, lithographic methods are now capable of carving out several hundred milli...
Melissa A. Fierke, Fan Li, and Prof. Andreas Stein
Material Matters 2008, 3.1, 10.
Keywords: Applications, Centrifugation, Chemical vapor deposition, Combustion, Deposition, Diffraction, Diffusion, Emulsion polymerization, Filtration, Methods, Photographs, Polymerization reactions, Precipitation, Semiconductor, Sol-gel

High Purity Metalorganic Precursors for CPV Device Fabrication

Thin film photovoltaic devices have become increasingly important in efficiently harnessing solar energy to meet consumer demand. Conventional crystalline silicon solar cells have demonstrated remark...
Ravi Kanjolia
Material Matters Volume 5 Article 4
Keywords: Absorption, Chemical vapor deposition, Degradations, Deposition, Mass spectrometry, Nuclear magnetic resonance spectroscopy, Purification, Semiconductor, Solar cells, Spectroscopy, Tissue microarrays, Vaporization

Mesoporous Oxides and Their Applications to Hydrogen Storage

Solid-state hydrogen storage is attractive from a technological point of view, but has encountered tremendous challenges in terms of practical storage capacity and kinetics.1-3 Hydrogen sorption, whe...
Arlon J. Hunt1, Karl Gross2, Samuel S. Mao1
Material Matters Volume 4 Article 2
Keywords: Addition reactions, Adsorption, Applications, Catalysis, Chemical vapor deposition, Condensations, Deposition, Diffusion, Insecticides, Magnetic resonance spectroscopy, Material Matters, Methods, Microscopy, Nanomaterials, Photographs, Scanning electron microscopy, Size-exclusion chromatography, Sol-gel, Substitutions, Transmission electron microscopy

Recent Developments in Silicon Anode Materials for High Performance Lithium-Ion Batteries

Xuefeng Song,1* Xiaobing Wang,2 Zhuang Sun,1 Peng Zhang,1 and Lian Gao1 1State Key Laboratory for Metallic Matrix Composite Materials, School of Materials Science and Engineering, Shanghai Jiao Tong ...
Keywords: Automotive, Deposition, Diffusion, Electrochemical reactions, Environmental, Lithiations, Materials Science, Microscopy, Nanomaterials, Nanotubes, Polymerization reactions, Reductions, Scanning electron microscopy, Transmission electron microscopy

Sol-Gel Science for Ceramic Materials

Silicon-based research has drawn much attention in recent years with targeted organizations such as the International Sol-Gel Society hosting workshops,1 and the Sol-Gel Gateway2 hosting a compendium...
Dr. Sandra Kay Young
Material Matters 2006, 1.3, 8.
Keywords: Applications, Articles, Ceramics, Chemfiles, Condensations, Deposition, Evaporation, Hydrosilylations, Infrared spectroscopy, Ligands, Newsletters, Nuclear magnetic resonance spectroscopy, Polymerization reactions, Sol-gel, Spectra, Type

Synthesis of Melting Gels Using Mono-Substituted and Di-Substituted Alkoxysiloxanes

Hybrid organic-inorganic sol-gel materials containing silica were first called “ORMOSILs” in 1984.1 Since then, the number of hybrid organicinorganic combinations has increased rapidly.2 Hybrid mater...
Lisa C. Klein and Andrei Jitianu
Material Matters, Volume 7, Number 2, 8–14
Keywords: Absorption, Adhesion, Calorimetry, Combustion, Condensations, Deposition, Exothermic, Filtration, Materials Science, Melting, Oxidations, Polymerization reactions, Purification, Semiconductor, Sol-gel, Solar cells, Solvents, Spin coating, Substitutions, Thermal analysis

Vistas in Current Magnetic Materials Research

Magnetism and magnetic materials have been of scientific interest for over 1,000 years. More recently, fundamental investigations have focused on exploring the various types of magnetic materials and...
Keywords: Automotive, Ceramics, Detection methods, Electronics, Materials Science, Nanomaterials, Precipitation, Semiconductor

Peer-Reviewed Papers


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1. Skokankova, J.; et al. Mater. Sci. Eng., C 26 (2-3), 208, (2006)

2. Abdelghani, A.; et al. Mater. Sci. Eng., C 26 (2-3), 542, (2006)

Synthesis of nano-bowls with a Janus template. Mo AH, Landon PB, Emerson CD, et al. Nanoscale 7(2), 771-5, (2015)


Development of hermetic barrier using vinyl triethoxysilane (VTEOS) and sol-gel processing Jackson A, et al. Material Matters 1, 11-12, (2006)

Fabrication of tunable silica-mineralized nanotubes using flagella as bio-templates Jo W, et al. Nanotechnology 23(5), (2012)

Mesoporous oxides and their applications to hydrogen storage. Hunt AJ, et al. Material Matters 4(2), 47-54, (2009)

Rod-Shaped Assemblies of FePt-PtTe2 through Dynamic Templating Yan Q, et al. Advanced Mat. 19(24), 4358-4363, (2007)

Sol-Gel Science for Ceramic Materials Young SK, et al. Material Matters, (2006)

Deposition of thick TEOS PECVD silicon oxide layers for integrated optical waveguide applications Bulla DAP and Morimoto NI Thin Solid Films 334, 60-64, (1998)

Kwon, O-Y. et al. Chem. Mater. 12, 1273, (2000)

Pérez-Pariente, J. et al. Chem. Mater. 12, 750, (2000)

Fabrication of mesoporous silica shells on solid silica spheres using anionic surfactants and their potential application in controlling drug release. El-Toni AM, Khan A, Ibrahim MA, et al. Molecules 17(11), 13199-210, (2012)


Co-enhancement of fluorescence and singlet oxygen generation by silica-coated gold nanorods core-shell nanoparticle. Ke X, Wang D, Chen C, et al. Nanoscale Res. Lett. 9(1), 2492, (2015)


A causal relation between bioluminescence and oxygen to quantify the cell niche. Lambrechts D, Roeffaers M, Goossens K, et al. PLoS ONE 9(5), e97572, (2014)


Au nanomatryoshkas as efficient near-infrared photothermal transducers for cancer treatment: benchmarking against nanoshells. Ayala-Orozco C, Urban C, Knight MW, et al. ACS Nano 8(6), 6372-81, (2014)


Ultralight nanofibre-assembled cellular aerogels with superelasticity and multifunctionality. Si Y, Yu J, Tang X, et al. Nat. Commun. 5, 5802, (2014)


Novel sponge-like molecularly imprinted mesoporous silica material for selective isolation of bisphenol A and its analogues from sediment extracts. Yang J, Li Y, Wang J, et al. Anal. Chim. Acta 853, 311-9, (2014)


Stochastic nanoroughness modulates neuron-astrocyte interactions and function via mechanosensing cation channels. Blumenthal NR, Hermanson O, Heimrich B, et al. Proc. Natl. Acad. Sci. U. S. A. 111(45), 16124-9, (2014)


Fabrication of fluorescent SiO2@zeolitic imidazolate framework-8 nanosensor for Cu(2+) detection. Song Y, Hu D, Liu F, et al. Analyst 140(2), 623-9, (2014)


Effect of surface functionality of silica nanoparticles on cellular uptake and cytotoxicity. Jambhrunkar S, Qu Z, Popat A, et al. Mol. Pharm. 11(10), 3642-55, (2014)


Durable diagnosis of seminal vesicle and sexual gland diseases using the nano optical sensor thin film Sm-doxycycline complex. Attia MS, Youssef AO, El-Sherif RH, et al. Anal. Chim. Acta 835, 56-64, (2014)


Needleless electrospinning with twisted wire spinneret. Holopainen J, Penttinen T, Santala E, et al. Nanotechnology 26(2), 025301, (2014)


Electrospun superhydrophobic membranes with unique structures for membrane distillation. Liao Y, Loh CH, Wang R, et al. ACS Appl. Mater. Interfaces 6(18), 16035-48, (2014)


Highly coke-resistant ni nanoparticle catalysts with minimal sintering in dry reforming of methane. Han JW, Kim C, Park JS, et al. ChemSusChem 7(2), 451-6, (2014)


Design of silica carrier for controlled release of molsidomine: effect of preparation methods of silica matrixes and their composites with molsidomine on the drug release kinetics in vitro. Parfenyuk EV, Dolinina ES, et al. Eur. J. Pharm. Biopharm. 88(3), 1038-45, (2014)


Sub-100nm gold nanomatryoshkas improve photo-thermal therapy efficacy in large and highly aggressive triple negative breast tumors. Ayala-Orozco C, Urban C, Bishnoi S, et al. J. Control. Release 191, 90-7, (2014)


Improvement of biodegradability, bioactivity, mechanical integrity and cytocompatibility behavior of biodegradable mg based orthopedic implants using nanostructured Bredigite (Ca7MgSi 4O 16) bioceramic coated via ASD/EPD technique. Razavi M, Fathi M, Savabi O, et al. Ann. Biomed. Eng. 42(12), 2537-50, (2014)


Multifunctional metal rattle-type nanocarriers for MRI-guided photothermal cancer therapy. Huang Y, Wei T, Yu J, et al. Mol. Pharm. 11(10), 3386-94, (2014)


Synthesis and characterization of Cu/Ag nanoparticle loaded mullite nanocomposite system: A potential candidate for antimicrobial and therapeutic applications. Kar S, Bagchi B, Kundu B, et al. Biochim. Biophys. Acta 1840(11), 3264-76, (2014)


Incorporation of ophiobolin a into novel chemoembolization particles for cancer cell treatment. Morrison R, Gardiner C, Evidente A, et al. Pharm. Res. 31(10), 2904-17, (2014)


Biological effects of sol-gel derived ZrO2 and SiO2/ZrO2 coatings on stainless steel surface--In vitro model using mesenchymal stem cells. Smieszek A, Donesz-Sikorska A, Grzesiak J, et al. J. Biomater. Appl. 29(5), 699-714, (2014)


Bactericidal micron-thin sol-gel films prevent pin tract and periprosthetic infection. Qu H, Knabe C, Burke M, et al. Mil. Med. 179(8 Suppl), 29-33, (2014)


In depth analysis of apoptosis induced by silica coated manganese oxide nanoparticles in vitro. Yu C, Zhou Z, Wang J, et al. J. Hazard. Mater. 283, 519-28, (2014)


Yeast-based self-organized hybrid bio-silica sol-gels for the design of biosensors. Ponamoreva ON, Kamanina OA, Alferov VA, et al. Biosens. Bioelectron. 67, 321-6, (2015)


Development and application of quartz crystal microbalance sensor based on novel molecularly imprinted sol-gel polymer for rapid detection of histamine in foods. Dai J, Zhang Y, Pan M, et al. J. Agric. Food Chem. 62(23), 5269-74, (2014)


Toward coordinated colloids: site-selective growth of titania on patchy silica particles. Bae C, Kim H, Montero Moreno JM, et al. Sci. Rep. 5, 9339, (2015)


Dendrimer-functionalized mesoporous silica as a reversed-phase/anion-exchange mixed-mode sorbent for solid phase extraction of acid drugs in human urine. Li Y, Yang J, Huang C, et al. J. Chromatogr. A. 1392, 28-36, (2015)


Investigation of bi-enzymatic reactor based on hybrid monolith with nanoparticles embedded and its proteolytic characteristics. Shangguan L, Zhang L, Xiong Z, et al. J. Chromatogr. A. 1388, 158-66, (2015)


Embedment of Ag(I)-organic frameworks into silica gels for microextraction of polybrominated diphenyl ethers in soils. Zhang CY, Yan ZG, Zhou YY, et al. J. Chromatogr. A. 1383, 18-24, (2015)


Preparation and chromatographic performance evaluation of cucurbit[7]uril immobilized silica. Ma L, Liu SM, Yao L, et al. J. Chromatogr. A. 1376, 64-73, (2015)


Coupling of solid phase microextraction with electrospray ionization ion mobility spectrometry and direct analysis of venlafaxine in human urine and plasma. Jafari MT, Saraji M, Ameri AH, et al. Anal. Chim. Acta 853, 460-8, (2014)


Encapsulation of metal clusters within MFI via interzeolite transformations and direct hydrothermal syntheses and catalytic consequences of their confinement. Goel S, Zones SI, Iglesia E, et al. J. Am. Chem. Soc. 136(43), 15280-90, (2014)


Engineering the synthesis of silica-gold nano-urchin particles using continuous synthesis. Sebastian V, Lee SK, Jensen KF, et al. Nanoscale 6(21), 13228-35, (2014)


1.9 μm superficially porous packing material with radially oriented pores and tailored pore size for ultra-fast separation of small molecules and biomolecules. Min Y, Jiang B, Wu C, et al. J. Chromatogr. A. 1356, 148-56, (2014)


Differential pulse voltammetry detection of dopamine and ascorbic acid by permselective silica mesochannels vertically attached to the electrode surface. Li W, Ding L, Wang Q, et al. Analyst 139(16), 3926-31, (2014)


Molecularly imprinted polymers based on SBA-15 for selective solid-phase extraction of baicalein from plasma samples. He H, Gu X, Shi L, et al. Anal. Bioanal. Chem 407(2), 509-19, (2015)


Large-scale high-quality 2D silica crystals: dip-drawing formation and decoration with gold nanorods and nanospheres for SERS analysis. Khanadeev VA, Khlebtsov BN, Klimova SA, et al. Nanotechnology 25(40), 405602, (2014)


Role of surface modification in zinc oxide nanoparticles and its toxicity assessment toward human dermal fibroblast cells. Ramasamy M, Das M, An SS, et al. Int. J. Nanomedicine 9, 3707-18, (2014)


Formulation and characterization of ORMOSIL particles loaded with budesonide for local colonic delivery. Petrovska-Jovanovska V, Geskovski N, Crcarevska MS, et al. Int. J. Pharm. 484(1-2), 75-84, (2015)


Construction of a two-in-one liposomal system (TWOLips) for tumor-targeted combination therapy. Su T, Long Y, Deng C, et al. Int. J. Pharm. 476(1-2), 241-52, (2015)


Merck 14,3851

Beil. 1,IV,1360

Aldrich MSDS 1, 1662:B / Corp MSDS 1 (2), 3262:A / FT-IR 1 (2), 1092:D / FT-IR 2 (3), 4379:A / FT-NMR 1 (3), 668:B / IR-Spectra (3), 1536:H / IR-Spectra (2), 1314:H / NMR-Reference 2 (2), 988:A / RegBook 1 (2), 2973:D / Sigma FT-IR 1 (2), 981:C / Structure Index 1, 470:D:8 / Vapor Phase 3, 1647:D

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