CAS Number 4098-30-0
Linear Formula (Si(CH3)2)6
Molecular Weight 348.93
EC Number 223-860-0
MDL number MFCD00053564
PubChem Substance ID 24867378
Popular Documents: Specification Sheet (PDF)
| Related Categories | CVD and ALD Precursors by Metal, Materials Science, Micro/NanoElectronics, Silicon, Vapor Deposition Precursors More... |
| mp | 229 °C(lit.) |
1 g in glass bottle
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