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462993 Aldrich

Methylsilane

electronic grade, ≥99.9%

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Properties

Related Categories CVD and ALD Precursors by Metal, Chemical Synthesis, Materials Science, Micro/NanoElectronics, Organometallic Reagents,
grade   electronic grade
vapor density   0.628 (−58 °C, vs air)
InChI Key   UIUXUFNYAYAMOE-UHFFFAOYSA-N
assay   ≥99.9%
form   liquid
impurities   <10 ppm Carbon dioxide (CO2)
  <10 ppm Nitrogen (N2)
  <100 ppm Dimethylsilane (CH3)2SiH2
  <100 ppm Methylchlorosilane CH3SiH2Cl
  <2 ppm Argon + Oxygen (Ar + O2)
  <50 ppm Methane (CH4)
  <50 ppm Silane (SiH4)
bp   −57 °C(lit.)
mp   −157 °C(lit.)

Description

Packaging

10, 20 g in stainless steel cylinder

Features and Benefits

Methylsilane is used in the plasma-assisted CVD of silicon carbide (SiC) and as a precursor to the epitaxial growth of SiGeC alloy layers via rapid thermal CVD. Recent developments include the use of methylsilane as a precursor to silicon-carbon-hydrogen polymer used as photoresists.

Precursor to silicon carbide or alloy thin films by chemical vapor deposition (CVD) and molecular beam epitaxy (MBE).

Recommended products

Stainless steel regulators Z527416 or Z527424 are recommended.

Price and Availability

Safety & Documentation

Safety Information

Symbol 
Signal word 
Danger
Hazard statements 
Precautionary statements 
Supplemental Hazard Statements 
Reacts violently with water.
RIDADR 
UN 3161 2.1
WGK Germany 
3
Protocols & Articles

Articles

High Purity Deposition Gases

High Purity CVD Gases are used in the deposition of amorphous and epitaxial silicon, SiGe alloys, and dielectrics as well as the manufacture of integrated circuits and photovolatics. The gases are al...
Chemfiles Volume 4 Article 3
Keywords: Catalog, Chemical vapor deposition, Deposition

Synthesis of Melting Gels Using Mono-Substituted and Di-Substituted Alkoxysiloxanes

Hybrid organic-inorganic sol-gel materials containing silica were first called “ORMOSILs” in 1984.1 Since then, the number of hybrid organicinorganic combinations has increased rapidly.2 Hybrid mater...
Lisa C. Klein and Andrei Jitianu
Material Matters, Volume 7, Number 2, 8–14
Keywords: Absorption, Adhesion, Calorimetry, Combustion, Condensations, Deposition, Exothermic, Filtration, Materials Science, Melting, Oxidations, Polymerization reactions, Purification, Semiconductor, Sol-gel, Solar cells, Solvents, Spin coating, Substitutions, Thermal analysis

Peer-Reviewed Papers
15

References

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