EMAIL THIS PAGE TO A FRIEND
463027 Aldrich

Germane

electronic grade, ≥99.997%

Purchase

Properties

Related Categories CVD and ALD Precursors by Metal, Chemical Synthesis, Gases, Materials Science, Micro/NanoElectronics,
grade   electronic grade
vapor density   1.53 (−142 °C, vs air)
InChI Key   QUZPNFFHZPRKJD-UHFFFAOYSA-N
assay   ≥99.997%
form   gas
impurities   <0.5 ppm Oxygen (O2)
  <1 ppm Carbon monoxide + Trigermane (CO+Ge3H8)
  <1 ppm THC
  <1 ppm Water (H2O)
  <2 ppm Carbon dioxide (CO2)
  <2 ppm Nitrogen (N2)
  <20 ppm Digermane (Ge2H6)
  <5 ppm Chlorogermanes
  <5 ppm Germoxanes
  <50 ppm Hydrogen (H2)
bp   −88.4 °C(lit.)
mp   −165 °C(lit.)
transition temp   critical temperature 35 °C

Description

Features and Benefits

Germane gas is used in the deposition of epitaxial and amorphous SiGe alloy layers used in the production of high performance devices including photovoltaic cells and integrated circuits (IC). Precursor to germanium-containing thin films by chemical vapor deposition (CVD) and molecular beam epitaxy (MBE). A CVD precursor for germanium carbide semiconducting films.

Packaging

15 g in stainless steel cylinder

5 g in lecture bottle

Recommended products

Stainless steel regulators Z527416 or Z527424 are recommended.

Price and Availability

Safety & Documentation

Safety Information

Symbol 
Signal word 
Danger
Hazard statements 
Precautionary statements 
RIDADR 
UN 2192 2.1(2.3)
WGK Germany 
3
RTECS 
LY4900000
Protocols & Articles

Articles

High Purity Deposition Gases

High Purity CVD Gases are used in the deposition of amorphous and epitaxial silicon, SiGe alloys, and dielectrics as well as the manufacture of integrated circuits and photovolatics. The gases are al...
Chemfiles Volume 4 Article 3
Keywords: Catalog, Chemical vapor deposition, Deposition

Peer-Reviewed Papers
15

References

Set your institution to view full text papers.
Related Products

Technical Service:

Our team of scientists has experience in all areas of research including Life Science, Material Science, Chemical Synthesis, Chromatography, Analytical and many others.

Bulk Ordering & Pricing:

Need larger quantities for your development, manufacturing or research applications?