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463035 Aldrich

Methane

electronic grade, ≥99.998%

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Properties

Related Categories CVD and ALD Precursors by Metal, Chemical Synthesis, Gases, Materials Science, Micro/NanoElectronics,
grade   electronic grade
vapor density   0.55 (vs air)
InChI Key   VNWKTOKETHGBQD-UHFFFAOYSA-N
assay   ≥99.998%
form   gas
autoignition temp.   998 °F
expl. lim.   15 %
impurities   <2 ppm CO
  <2 ppm CO2
  <3 ppm Water (H2O)
  <5 ppm Ethane (C2H5)
  <5 ppm Nitrogen (N2)
bp   −161 °C(lit.)
mp   −183 °C(lit.)
transition temp   critical temperature −82.1 °C
density   0.716 g/mL at 25 °C(lit.)

Description

Features and Benefits

Methane is used as a carbon source for the chemical vapor deposition (CVD) of carbide and diamond thin films.

Packaging

24 L in stainless steel cylinder

Recommended products

High-purity regulators Z527378 or Z527386 are recommended.

Price and Availability

Safety & Documentation

Safety Information

Symbol 
Signal word 
Danger
Hazard statements 
Precautionary statements 
RIDADR 
UN 1971 2.1
WGK Germany 
nwg
RTECS 
PA1490000
Flash Point(F) 
-306.4 °F
Flash Point(C) 
-188 °C

Documents

Certificate of Analysis

Certificate of Origin

Protocols & Articles
Peer-Reviewed Papers
15

References

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