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463132 Aldrich

Diborane-d6

10% in D2, electronic grade

DOWNLOAD MSDS (PDF)
Diborane-d6 10% in D2, electronic grade
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Properties

grade   electronic grade
assay   9-11% (balance is deuterium)
concentration   10% in D2
bp   −92.5 °C(lit.)
mass shift   M+6

Description

Application

Diborane gas is used primarily as a p-type dopant in the deposition of epitaxial and amorphous silicon thin films. The unique properties of diborane-d6 can result in increased device performance and reliability.

Packaging

48 L in steel cylinder

Recommended products

Stainless steel regulators Z527416 or Z527424 are recommended.

Price and Availability

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