521280
Aldrich
Tris(diethylamido)(tert-
Tris(diethylamido)(tert-butylimido)tantalum(V)
99%, ≥99.99% trace metals basis
DOWNLOAD MSDS (PDF)Synonym:
TBTDET,
Tris(diethylamino)(tert-
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CAS Number 169896-41-7
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Linear Formula (CH3)3CNTa(N(C2H5)2)3
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Molecular Weight 468.46
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MDL number MFCD02684506
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PubChem Substance ID 24874200
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Popular Documents: Specification Sheet (PDF)
Properties
| Related Categories | CVD and ALD Precursors by Metal, Catalysis and Inorganic Chemistry, Chemical Synthesis, Materials Science, Micro/NanoElectronics, |
| Quality Level | HITECH |
| assay | ≥99.99% trace metals basis |
| 99% | |
| form | liquid |
| density | 1.252 g/mL at 25 °C(lit.) |
Description
General description
Atomic number of base material: 73 Tantalum
Packaging
5 mL in ampule
Price and Availability
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electronic grade, ≥95% (CP), ≥99.99% trace metals basis
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