|Related Categories||Materials Science, Micro/NanoElectronics, Silanes, Silicon, Solution Deposition Precursors More...|
|bp||96-99 °C/2-3 mmHg(lit.)|
|density||0.944 g/mL at 25 °C(lit.)|
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5, 25 g in ampule
Certificate of Analysis
|Personal Protective Equipment||Eyeshields, Gloves, half-mask respirator (US), multi-purpose combination respirator cartridge (US)|
|Flash Point(F)||222.8 °F|
|Flash Point(C)||106 °C|
Low κ materials address technical challenges of increased chip performance by allowing for the reduction of spacing between metals in multi-level interconnects, interlayer dielectrics and passivation...
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