Synonym: TBS
CAS Number 18166-43-3
Linear Formula ((CH3)3CO)3SiOH
Molecular Weight 264.43
MDL number MFCD00271024
PubChem Substance ID 24879332
Popular Documents: Specification Sheet (PDF)
| Related Categories | Materials Science, Micro/NanoElectronics, Silanes, Silicon, Solution Deposition Precursors More... |
| assay | 99.999% |
| form | solid |
| bp | 205-210 °C(lit.) |
| mp | 63-65 °C(lit.) |
5, 25 g in glass bottle
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