663301 Aldrich


packaged for use in deposition systems

Synonym: Aluminum trimethanide, TMA


Related Categories 13: Aluminium, Aluminum, CVD and ALD Precursors Packaged for Deposition Systems, CVD and ALD Precursors by Metal, Chemical Synthesis,
vapor pressure   69.3 mmHg ( 60 °C)
form   liquid
bp   125-126 °C(lit.)
mp   15 °C(lit.)
density   0.752 g/mL at 25 °C(lit.)


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General description

Atomic number of base material: 13 Aluminum


25 g in ss cylinder

Protocols & Applications

High Purity Metalorganic Precursors for CPV Device Fabrication

Precursors Packaged for Depositions Systems

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