697281
Aldrich
Tris(tert-butoxy)silanol
packaged for use in deposition systems
DOWNLOAD MSDS (PDF)Synonym: TBS
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CAS Number 18166-43-3
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Linear Formula ((CH3)3CO)3SiOH
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Molecular Weight 264.43
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MDL number MFCD00271024
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Popular Documents: Specification Sheet (PDF)
Properties
| Related Categories | 14: Silicon, CVD and ALD Precursors Packaged for Deposition Systems, CVD and ALD Precursors by Metal, Chemical Synthesis, Materials Science, |
| form | solid |
| bp | 205-210 °C(lit.) |
| mp | 63-65 °C(lit.) |
Description
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General description
Atomic number of base material: 14 Silicon
Packaging
25 g in ss cylinder
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