725544
Aldrich
Tetrakis(ethylmethylamido)
Tetrakis(ethylmethylamido)hafnium(IV)
packaged for use in deposition systems
DOWNLOAD MSDS (PDF)Synonym:
TEMAH,
Tetrakis(ethylmethylamino)
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CAS Number 352535-01-4
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Linear Formula [(CH3)(C2H5)N]4Hf
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Molecular Weight 410.90
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MDL number MFCD03427130
Properties
| Related Categories | 72: Hafnium, CVD and ALD Precursors Packaged for Deposition Systems, CVD and ALD Precursors by Metal, Catalysis and Inorganic Chemistry, Chemical Synthesis, |
| form | liquid |
| bp | 78 °C/0.01 mmHg(lit.) |
| mp | <-50 °C |
| density | 1.324 g/mL at 25 °C(lit.) |
| storage temp. | 2-8°C |
Description
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General description
Atomic number of base material: 72 Hafnium
Packaging
10 g in ss cylinder
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