Properties
| Related Categories | Labware, Materials Science Labware, Plasma Cleaners More... |
| H × W × D | 8.5 in. × 10 in. × 8 in. |
Description
General description
Use with the Expanded or Basic Plasma Cleaner (115 V) for fine control of up to 2 process gases, process gas mixing, and monitoring of chamber pressure.
• Dual gas inputs
• Flowmeter 1: 49 mL/min maximum flowrate *
• Flowmeter 2: 104 mL/min maximum flowrate *
• ±2% accuracy
• Thermocouple vacuum gauge and digital meter (1 to 1999 mTorr)
• Input/Output connection:
* Maximum flowrate varies with process gas and regulated pressure. Correlated flowrate tables are available for the most common process gases (Air, Ar, N2, O2) used with our Plasma Cleaners and metered at 10 psig. Flowrate tables for other process gases and regulated pressures can be made available.
Price and Availability
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