663301
Aldrich

Trimethylaluminum

for Cambridge NanoTech Inc. ALD system

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Synonym

Aluminum trimethanide

TMA

Molecular Formula

(CH₃)₃Al

Molecular Weight

72.09

CAS Number

75-24-1

Beilstein Registry Number

3587197

MDL number

MFCD00008252

PubChem Substance ID

24884629

EG/EC Number

200-853-0

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Descriptions

Packaging

25 g in ss cyl

Properties

vapor pressure

69.3 mmHg ( 60 °C)

form

liquid

125-126 °C(lit.)

15 °C(lit.)

density

0.752 g/mL at 25 °C(lit.)

References

Beilstein

Beil. 4,IV,4397

Fieser

Fieser 8,506 / Fieser 15,341 / Fieser 17,372

reference

Aldrich MSDS 1, 1784:C / Corp MSDS 1 (2), 3479:D / RegBook 1 (2), 3043:A / Sax 6, 178 / Structure Index 1, 481:C:5

Safety

Hazard Codes

F,C

Risk Statements

14-17-34

Safety Statements

16-43-45

RIDADR

UN 3394 4.2/PG 1

WGK Germany

NWG

RTECS

BD2204000

Flash Point(F)

1 °F

Flash Point(C)

-17 °C

Related Categories

... Precursors by Metal > Aluminum

... Organometallic Reagents > Organoaluminum

... Vapor Deposition Precursors > Precursors Packaged for Deposition Systems

MSDS

Specification Sheet

Certificate of Analysis

More Information