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Product Catalog
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Micro/Nanoelectronics
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Vapor Deposition Precursors
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Precursors by Metal
> Aluminum
Aluminum
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Description
Molecular Formula
Product #
Aluminum tris(2,2,6,6-tetramethyl-3,5-
heptanedionate) 98%
Al(OCC(CH
3
)
3
CHCOC(CH
3
)
3
)
3
397288
Dimethylaluminum isopropoxide 99.99+ % metals basis, ≥95%
(CH
3
)
2
AlOCH(CH
3
)
2
J100047
Triisobutylaluminum
[(CH
3
)
2
CHCH
2
]
3
Al
257206
Trimethylaluminum 97%
(CH
3
)
3
Al
257222
Trimethylaluminum for Cambridge NanoTech Inc. ALD system
(CH
3
)
3
Al
663301
Tris(dimethylamido)
aluminum(III)
Al(N(CH
3
)
2
)
3
469947
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