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Product Catalog
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Vapor Deposition Precursors
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Precursors by Metal
> Tantalum
Tantalum
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Description
Molecular Formula
Product #
Pentakis(dimethylamino)
tantalum(V) 99.9%
Ta(N(CH
3
)
2
)
5
496863
Tris(diethylamido)
(
tert
-butylimido)tantalum(V) 99%, 99.99+ % trace metals basis
(CH
3
)
3
CNTa(N(C
2
H
5
)
2
)
3
521280
Tris(diethylamido)
(
tert
-butylimido)tantalum(V) for Cambridge Nanotech Inc. ALD systems
(CH
3
)
3
CNTa(N(C
2
H
5
)
2
)
3
668990
Tris(diethylamido)
(ethylimido)tantalum(V) 99.99% trace metals basis
C
2
H
5
NTa(N(C
2
H
5
)
2
)
3
517836
Tris(ethylmethylamido)
(
tert
-butylimido)tantalum(V) electronic grade, ≥95% (CP), 99.99+ % trace metals basis
C
13
H
33
N
4
Ta
J100043
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