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Solution Deposition Precursors
> Hafnium
Hafnium
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Description
Molecular Formula
Product #
Hafnium(IV)
n
-butoxide 99% (purity excludes ~1% Zr)
C
16
H
36
HfO
4
667943
Hafnium(IV)
tert
-butoxide 99.99% trace metals basis (purity excludes ~2000 ppm zirconium.)
C
16
H
36
HfO
4
445541
Tetrakis(1-methoxy-2-methyl-
2-propoxy)hafnium(IV) electronic grade, 99.99% trace metals basis
C
20
H
44
HfO
8
568171
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