The ability to constantly replenish the chemicals in the EpiFill system results in decreased equipment downtime, minimized human traffic in clean-rooms, reduced safety hazards and higher overall throughput.
Applications include
Liquid source delivery for production environment deposition systems employed to fabricate semiconductor devices
TMA/TMG delivery in MOVPE/MOCVD/ALD or solar cells, HBLEDSs
The ability to constantly replenish the chemicals in the EpiFill system results in decreased equipment downtime, minimized human traffic in clean-rooms, reduced safety hazards and higher overall throughput.