Certain features of will be down for maintenance the evening of Friday August 18th starting at 8:00 pm CDT until Saturday August 19th at 12:01 pm CDT.   Please note that you still have telephone and email access to our local offices. We apologize for any inconvenience.

Kaohsiung, Taiwan

Manufacturing Facility for MO Sources and IC Precursors

SAFC Kaohsiung is located on Kaohsiung Science Park in Taiwan. The site can handle and characterize highly specialized commercial-scale chemicals and features a dedicated customer support center.

The new expansion in 2012 underlined the commitment to the Asia-Pacific electronics markets, and increases the site's existing capacity for High Brightness LED (HBLED), Atomic Layer Deposition (ALD), and Chemical Vapor Deposition (CVD) precursors and offers regional transfilling and technical service and support. It enhances Taiwan as a strategic regional hub from which to leverage the company's existing proprietary knowledge and capabilities as a leading provider of ultra-high purity metalorganic and silicon precursors for thin film deposition production processes for the microelectronics and optoelectronic markets.

SAFC Hitech’s Kaohsiung site capabilities can handle and characterize highly specialized commercial-scale chemicals and features a dedicated customer support center. The site also provides integrated inert atmosphere transfilling stations, state-of-the-art analytical instrumentation for the detection of ultra-low metallic and oxygen containing contaminants and dedicated cylinder preparation and packaging areas. The site is ISO 9001 certified for quality with work to acquire ISO 14001/18000 certification for safety and environmental protocols in process.

Core Technologies

  • Synthesis of commercial-scale high-purity IC/LED chemicals
  • Transfill of high-purity precursors in gram to kg quantities
  • Extensive analytical laboratories
  • Process safety evaluation support
  • Material waste treatment and container recycling

Core Competencies

  • Semiconductor precursor fabrication
  • Safe, environmentally friendly operating practices
  • Dedicated technology development
  • Synthesis, characterisation, evaluation


  • Synthetic capacities: tens of tons per year
  • Transfill capabilities: transfer to any customer container
  • Future production synthesis: 5L-3000L glass/stainless steel vessels
  • Process temperature range: -30°C to +170°C
Contact Facility

Facility Address:
No.15, Luke 3rd RD., Kaohsiung Science Park,
Luzhu Dist., Kaohsiung City 82151, Taiwan
Tel: +886-7-627-8999
Fax: +886-7-695-5088

Certificates & Documents
Request a Site Audit

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