Deposition Substrates and Silicon Wafers
Chemfiles Volume 4 Article 3
Successful deposition of materials often depends on the proper substrates, with a good lattice match and a clean, even surface. Aldrich is proud to offer a variety of new single crystal substrates and silicon wafers in multiple orientations to meet your deposition needs. All these materials undergo rigorous analytical testing including trace metal analysis and x-ray diffraction in order to insure the highest purity standards. If there is an orientation or material you cannot find please contact us at matsci@sial.com.
Single Crystal Substrates (10 x 10 x 0.5 mm, single side polished)
| Orientation | |||||||||||
| Composition | Formula | mp (°C) |
Unit Cell (Å) |
Hex (0001) |
Cubic (100) |
Cubic (110) |
Cubic (111) |
Rhomb (100)1 |
Tetrag (100) |
Tetrag (001) |
Tetrag (110) |
| Aluminum oxide | Al2O3 | 2040 | a=4.758 c=12.992 | 634875 | – | – | – | – | – | – | – |
| Lanthanum aluminum oxide |
LaAlO3 | 2080 | a=5.357 c=13.22 | – | – | – | – | 634735 | – | – | – |
| LSAT Lanthanum aluminum oxide-strontium aluminum tantalum oxide |
(LaAlO3)0.3 (Sr2AITaO6)0.7 |
1840 | a=3.868 | – | 635050 | – | – | – | – | – | – |
| Magnesium aluminate |
MgAl2O4 | 2130 | a=8.083 | – | 635073 | 634840 | 634832 | – | – | – | – |
| Magnesium oxide | MgO | 2852 | a=4.216 | – | 634646 | 634700 | 634697 | – | – | – | – |
| Silicon dioxide, optical grade |
SiO2 | 1610 | a=4.914 c=5.405 | 634867 | – | – | – | – | – | – | – |
| Strontium lanthanum aluminate |
SrLaAlO4 | 1650 | a=3.756 c=12.63 | – | – | – | – | – | 635111 | 634891 | – |
| Strontium titanate | SrTiO3 | 2080 | a=3.905 | – | 634689 | 634670 | 638161 | – | – | – | – |
| Titanium(IV) oxide rutile |
TiO2 | 1840 | a=4.5936 c=2.9582 | – | – | – | – | – | 635111 | 634891 | 635065 |
| Yttrium vanadate | YVO4 | 1825 | a=7.12 c=6.29 | – | – | – | – | – | – | – | 635103 |
| 1) Cubic @>435 °C, a=3.821 Å | |||||||||||
Silicon Wafers (0.5 mm thick, single side polished)
| Catalog Number | Orientation | Radius (in.) |
Semiconductor Type | Dopant | Resistivity (Ω cm) |
| 646687 | (100) | 2 | - | none | 102–104 |
| 647101 | (111) | 2 | - | none | 102–104 |
| 647535 | (100) | 3 | - | none | 102–104 |
| 647543 | (111) | 3 | - | none | 102–104 |
| 647675 | (100) | 2 | P-type | boron | 10-3–40 |
| 647705 | (111) | 2 | P-type | boron | 10-3–40 |
| 647764 | (100) | 3 | P-type | boron | 10-3–40 |
| 647772 | (111) | 3 | P-type | boron | 10-3–40 |
| 647780 | (100) | 2 | N-type | phosphorous | 10-3–40 |
| 647799 | (111) | 2 | N-type | phosphorous | 10-3–40 |
| 64,7802 | (100) | 3 | N-type | phosphorous | 10-3–40 |
| 647810 | (111) | 3 | N-type | phosphorous | 10-3–40 |
| Silicon wafers have a density of 2.33 g/mL; unit cell: cubic, a = 5.4037 Å | |||||
Gold-Coated Substrates
We now offer gold-coated substrates with 100 to 2000 Å gold coatings on: Glass microscope slides, round and square coverslips, silicon wafers, or mica. Please visit us at www.sigma-aldrich.com for more information.
