Deposition Substrates and Silicon Wafers

Chemfiles Volume 4 Article 3

Successful deposition of materials often depends on the proper substrates, with a good lattice match and a clean, even surface. Aldrich is proud to offer a variety of new single crystal substrates and silicon wafers in multiple orientations to meet your deposition needs. All these materials undergo rigorous analytical testing including trace metal analysis and x-ray diffraction in order to insure the highest purity standards. If there is an orientation or material you cannot find please contact us at matsci@sial.com.

Single Crystal Substrates (10 x 10 x 0.5 mm, single side polished)

        Orientation
Composition Formula mp
(°C)
Unit Cell
(Å)
Hex
(0001)
Cubic
(100)
Cubic
(110)
Cubic
(111)
Rhomb
(100)1
Tetrag
(100)
Tetrag
(001)
Tetrag
(110)
Aluminum oxide Al2O3 2040 a=4.758 c=12.992 634875
Lanthanum
aluminum oxide
LaAlO3 2080 a=5.357 c=13.22 634735
LSAT
Lanthanum
aluminum
oxide-strontium
aluminum tantalum
oxide
(LaAlO3)0.3
(Sr2AITaO6)0.7
1840 a=3.868 635050
Magnesium
aluminate
MgAl2O4 2130 a=8.083 635073 634840 634832
Magnesium oxide MgO 2852 a=4.216 634646 634700 634697
Silicon dioxide,
optical grade
SiO2 1610 a=4.914 c=5.405 634867
Strontium
lanthanum
aluminate
SrLaAlO4 1650 a=3.756 c=12.63 635111 634891
Strontium titanate SrTiO3 2080 a=3.905 634689 634670 638161
Titanium(IV)
oxide rutile
TiO2 1840 a=4.5936 c=2.9582 635111 634891 635065
Yttrium vanadate YVO4 1825 a=7.12 c=6.29 635103
1) Cubic @>435 °C, a=3.821 Å


Silicon Wafers (0.5 mm thick, single side polished)

Catalog Number Orientation Radius
(in.)
Semiconductor Type Dopant Resistivity
(Ω cm)
646687 (100) 2 - none 102–104
647101 (111) 2 - none 102–104
647535 (100) 3 - none 102–104
647543 (111) 3 - none 102–104
647675 (100) 2 P-type boron 10-3–40
647705 (111) 2 P-type boron 10-3–40
647764 (100) 3 P-type boron 10-3–40
647772 (111) 3 P-type boron 10-3–40
647780 (100) 2 N-type phosphorous 10-3–40
647799 (111) 2 N-type phosphorous 10-3–40
64,7802 (100) 3 N-type phosphorous 10-3–40
647810 (111) 3 N-type phosphorous 10-3–40
Silicon wafers have a density of 2.33 g/mL; unit cell: cubic, a = 5.4037 Å


Gold-Coated Substrates

We now offer gold-coated substrates with 100 to 2000 Å gold coatings on: Glass microscope slides, round and square coverslips, silicon wafers, or mica. Please visit us at www.sigma-aldrich.com for more information.

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