469858

Tetrakis(dimethylamido)titanium(IV)

99.999% trace metals basis

• Synonym(s): TDMAT, Tetrakis(dimethylamino)titanium(IV)
• Linear Formula: [(CH₃)₂N]₄Ti
• CAS Number: 3275-24-9
• Molecular Weight: 224.17
• Número EC: 221-904-3
• Número MDL: MFCD00014861
• ID de substância PubChem: 24870618
• NACRES: NA.23

Properties

• Nível de qualidade: 200
• teor: 99.999% trace metals basis
• forma: liquid
• reaction suitability: core: titanium
• pb: 50 °C/0.5 mmHg (lit.)
• densidade: 0.947 g/mL at 25 °C (lit.)
• SMILES string: CN(C)[Ti](N(C)C)(N(C)C)N(C)C
• InChI: 1S/4C2H6N.Ti/c4*1-3-2;/h4*1-2H3;/q4*-1;+4
• InChI key: MNWRORMXBIWXCI-UHFFFAOYSA-N

Description

Descrição geral

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Aplicação

Tetrakis(dimethylamido)titanium(IV) (TDMAT) is a precursor to titanium nitride (TiN) thin films by organometallic chemical vapor deposition (OMCVD)and titanium dioxide thin films by atomic layer deposition (ALD).TDMAT undergoes exothermal reaction with excess cyclopentadiene to yield tris(dimethylamido)(η5-cyclopentadienyl)titanium(IV).

Safety Information

• Pictogramas: GHS02,GHS05
• Palavra indicadora: Danger
• Frases de perigo: H225 - H260 - H314
• Declarações de precaução: P210 - P223 - P231 + P232 - P280 - P303 + P361 + P353 - P305 + P351 + P338
• Classificações de perigo: Flam. Liq. 2 - Skin Corr. 1B - Water-react 1
• Perigos de suplementos: EUH014
• Código de classe de armazenamento: 4.3 - Hazardous materials, which set free flammable gases upon contact with water
• WGK: WGK 3
• Ponto de fulgor (ºF): -22.0 °F - closed cup
• Ponto de fulgor (ºC): -30 °C - closed cup
• Equipamento de proteção individual: Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter