Merck
All Photos(4)

553468

Sigma-Aldrich

Tris(tert-butoxy)silanol

99.999%

Synonym(s):
TBS
Linear Formula:
((CH3)3CO)3SiOH
CAS Number:
Molecular Weight:
264.43
Número MDL:
ID de substância PubChem:
NACRES:
NA.23

Nível de qualidade

100

teor

99.999%

forma

solid

pb

205-210 °C (lit.)

pf

63-65 °C (lit.)

SMILES string

CC(C)(C)O[Si](O)(OC(C)(C)C)OC(C)(C)C

InChI

1S/C12H28O4Si/c1-10(2,3)14-17(13,15-11(4,5)6)16-12(7,8)9/h13H,1-9H3

InChI key

HLDBBQREZCVBMA-UHFFFAOYSA-N

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Descrição geral

Tris(tert-butoxy)silanol can react with various metal alkyl amides to act as precursors for vapor deposition metal silicates. It also acts as a suitable precursor for deposition of silica.

Aplicação

Tris(tert-alkoxy)silanols reacts with tetrakis(dimethylamino)-hafnium vapor(Hf(N(CH3)2)4) for vapor phase deposition of hafnium silicate glass films. Tris(tert-butoxy)silanol is used for atomic layer deposition (ALD) of highly conformal layers of amorphous silicon dioxide and aluminum oxide nanolaminates.

Embalagem

5, 25 g in glass bottle

Código de classe de armazenamento

13 - Non Combustible Solids

WGK

WGK 3

Ponto de fulgor (ºF)

Not applicable

Ponto de fulgor (ºC)

Not applicable

Equipamento de proteção individual

Eyeshields, Gloves, type N95 (US)

Certificate of Analysis

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Certificate of Origin

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