Merck
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760404

Tantalum(V) ethoxide

packaged for use in deposition systems

Synonym(s):
Pentaethyl tantalate, Pentaethoxytantalum, Tantalum pentaethoxide, PET
Linear Formula:
Ta(OC2H5)5
CAS Number:
Molecular Weight:
406.25
Beilstein:
3678999
Número EC:
Número MDL:
ID de substância PubChem:
NACRES:
NA.23

forma

liquid

índice de refração

n20/D 1.487 (lit.)

pb

155 °C/0.01 mmHg (lit.)

pf

21 °C (lit.)

densidade

1.566 g/mL at 25 °C (lit.)

SMILES string

CCO[Ta](OCC)(OCC)(OCC)OCC

InChI

1S/5C2H5O.Ta/c5*1-2-3;/h5*2H2,1H3;/q5*-1;+5

InChI key

HSXKFDGTKKAEHL-UHFFFAOYSA-N

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Aplicação

Tantalum(V) ethoxide precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods

Embalagem

25 g in stainless steel cylinder

Pictogramas

Flame

Palavra indicadora

Warning

Frases de perigo

Declarações de precaução

Classificações de perigo

Flam. Liq. 3

Código de classe de armazenamento

3 - Flammable liquids

WGK

WGK 1

Ponto de fulgor (ºF)

84.2 °F - closed cup

Ponto de fulgor (ºC)

29 °C - closed cup

Certificate of Analysis

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Certificate of Origin

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