Nanolithography. Large-scale nanoshaping of ultrasmooth 3D crystalline metallic structures.

Science (New York, N.Y.) (2014-12-17)
Huang Gao, Yaowu Hu, Yi Xuan, Ji Li, Yingling Yang, Ramses V Martinez, Chunyu Li, Jian Luo, Minghao Qi, Gary J Cheng
RESUMO

We report a low-cost, high-throughput benchtop method that enables thin layers of metal to be shaped with nanoscale precision by generating ultrahigh-strain-rate deformations. Laser shock imprinting can create three-dimensional crystalline metallic structures as small as 10 nanometers with ultrasmooth surfaces at ambient conditions. This technique enables the successful fabrications of large-area, uniform nanopatterns with aspect ratios as high as 5 for plasmonic and sensing applications, as well as mechanically strengthened nanostructures and metal-graphene hybrid nanodevices.

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