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ReagentPlus®, 99.9%

HMDS, 1,1,1,3,3,3-Hexamethyldisilazane
Linear Formula:
CAS Number:
Molecular Weight:
EC Number:
MDL number:
PubChem Substance ID:

Quality Level

product line






refractive index

n20/D 1.407 (lit.)


125 °C (lit.)

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InChI key


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General description

Hexamethyldisilazane (HDMS) is an organoslicon compound.HDMS is a colorless liquid used as a reagent and precursor in organic synthesis and organometallic chemistry.


Used in
  • condensation reactions of heterocyclic compounds, such as derivatives of xanthine
  • adhesion promoter for photoresist in photolithography
  • electron microscopy, as an alternative to critical point drying during sample preparation
  • pyrolysis-gas chromatography-mass spectrometry, in order to enhance detectability of compounds with polar functional groups.


25, 100 mL in Sure/Seal™

Legal Information

ReagentPlus is a registered trademark of Sigma-Aldrich Co. LLC


FlameSkull and crossbones

Signal Word


Hazard Classifications

Acute Tox. 3 Dermal - Acute Tox. 4 Inhalation - Acute Tox. 4 Oral - Aquatic Chronic 3 - Flam. Liq. 2

Storage Class Code

3 - Flammable liquids



Flash Point(F)

52.5 °F - closed cup

Flash Point(C)

11.4 °C - closed cup

Personal Protective Equipment

dust mask type N95 (US), Eyeshields, Gloves

Certificate of Analysis

Enter Lot Number to search for Certificate of Analysis (COA).

Certificate of Origin

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G Chiavari et al.
Journal of chromatography. A, 922(1-2), 235-241 (2001-08-07)
Alpha-amino acids were pyrolysed at 600 degrees C in the presence of hexamethyldisilazane (HMDS) and the formed volatile products were analysed on line by gas chromatography-mass spectrometry (GC-MS). Glycine, alanine, valine, leucine, isoleucine, norleucine, methionine, phenylalanine yielded principally the trimethylsilyl
D F Bray et al.
Microscopy research and technique, 26(6), 489-495 (1993-12-15)
Three different drying methods, critical-point drying (CPD), Peldri II, and hexamethyldisilazane (HMDS), were compared using representative animal (rat kidney, trachea, duodenum, lung, and red blood cells) and plant (leaves from ten species of monocotyledons and dicotyledons) specimens. All three drying
I-Shuo Huang et al.
Biology, 9(8) (2020-07-28)
Aside from two samples collected nearly 50 years ago, little is known about the microbial composition of wind tidal flats in the hypersaline Laguna Madre, Texas. These mats account for ~42% of the lagoon's area. These microbial communities were sampled
Greta M de Waal et al.
Scientific reports, 10(1), 8777-8777 (2020-05-31)
Gut dysbiosis contributes to the development of a dysfunctional gut barrier, facilitating the translocation of bacteria and inflammagens, and is implicated in colorectal cancer (CRC) pathogenesis. Such 'leaky gut' conditions result in systemic inflammation, of which a hallmark is increased
Joachim C Burbiel et al.
Beilstein journal of organic chemistry, 2, 20-20 (2006-10-28)
Poly-substituted xanthine derivatives are an important class of compounds in medicinal chemistry. Substitution at the 8-position of the purine ring is generally accessible by ring closure of a carboxamido-substituted uracil precursor. Although several procedures to accomplish this synthetic step have


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