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Tetramethylammonium hydroxide solution

25 wt. % in methanol

Linear Formula:
CAS Number:
Molecular Weight:
MDL number:
PubChem Substance ID:

Quality Level

vapor pressure

17.5 mmHg ( 20 °C)




25 wt. % in methanol


≤10% water
≤2% chloride


0.866 g/mL at 25 °C

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InChI key


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General description

Tetramethylammonium hydroxide is a quaternary ammonium salt generally used as an anisotropic etchant for silicon due to its high silicon etching rate.


Tetramethylammonium hydroxide solution (25 wt.% solution in methanol) may be used in the synthesis of zirconium oxides via a modified sol-gel method with potential application as catalyst materials in CO hydrogenation.


100, 4×100, 500 mL in glass bottle

Signal Word


Hazard Classifications

Acute Tox. 2 Dermal - Acute Tox. 2 Oral - Acute Tox. 3 Inhalation - Aquatic Chronic 3 - Eye Dam. 1 - Flam. Liq. 3 - Skin Corr. 1B - STOT RE 1 Dermal - STOT SE 1

Storage Class Code

3 - Flammable liquids



Flash Point(F)

80.6 °F - closed cup

Flash Point(C)

27 °C - closed cup

Personal Protective Equipment

dust mask type N95 (US), Eyeshields, Gloves

Certificate of Analysis

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Certificate of Origin

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Study on anisotropic silicon etching characteristics in various surfactant-added tetramethyl ammonium hydroxide water solutions.
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The characteristic behavior of TMAH water solution for anisotropic etching on both silicon substrate and SiO 2 layer.
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