697281

Tris(tert-butoxy)silanol

packaged for use in deposition systems

• Synonym(s): TBS
• Linear Formula: ((CH₃)₃CO)₃SiOH
• CAS Number: 18166-43-3
• Molecular Weight: 264.43
• MDL number: MFCD00271024
• PubChem Substance ID: 329761906
• NACRES: NA.23

Properties

• Quality Level: 100
• assay: ≥99.0% (GC); ≥99.998% trace metals basis (ICP)
• form: solid
• bp: 205-210 °C (lit.)
• mp: 63-65 °C (lit.)
• SMILES string: CC(C)(C)O[Si](O)(OC(C)(C)C)OC(C)(C)C
• InChI: 1S/C12H28O4Si/c1-10(2,3)14-17(13,15-11(4,5)6)16-12(7,8)9/h13H,1-9H3
• InChI key: HLDBBQREZCVBMA-UHFFFAOYSA-N

Description

General description

Atomic number of base material: 14 Silicon

Application

Precursors Packaged for Depositions Systems

Packaging

25 g in stainless steel cylinder

Safety Information

• Storage Class Code: 13 - Non Combustible Solids
• WGK: WGK 3
• Flash Point(F): Not applicable
• Flash Point(C): Not applicable
• Personal Protective Equipment: dust mask type N95 (US), Eyeshields, Gloves