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  • Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Journal of nanoscience and nanotechnology (2014-04-18)
Shaoming Yang, Xiuqin Chen, Kazuo Yamamoto, Masanori Iitake, D Nishio-Hamane, Hideki Sakai, Masahiko Abe
摘要

The structural and functional characterizations of titanium nitride (TiN) advanced ceramic microsprings (CMSs), with a coil diameter of several micrometers and synthesized by chemical vapor deposition (CVD) were investigated by microscopy techniques. The CMSs were sufficiently mechanically elastic for extension to more than 1.3 times their original size, and they spontaneously contracted to their original state on releasing the tension. To explore their application to a microdevice, a method of manufacturing TiN-CMS microcircuit elements was developed. The I-V plots of the elements indicated that the CMSs were as conductive as metals.

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钛, foil, thickness 0.127 mm, 99.7% trace metals basis
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钛, foil, thickness 0.25 mm, 99.7% trace metals basis
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钛, powder, <45 μm avg. part. size, 99.98% trace metals basis
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氮化钛, <3 μm
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钛, powder, −100 mesh, 99.7% trace metals basis
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钛, foil, thickness 0.025 mm, 99.98% trace metals basis
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钛, sponge, 3-19 mm, 99.5% trace metals basis
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钛, wire, diam. 0.25 mm, 99.7% trace metals basis
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钛, nanoparticles, dispersion, <100 nm particle size, in mineral oil, 98.5% trace metals basis
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钛, foil, thickness 2.0 mm, 99.7% trace metals basis
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钛, foil, thickness 0.1 mm, 99.99% trace metals basis
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钛, crystalline, 5-10 mm, ≥99.99% trace metals basis (purity exclusive of Na and K content)
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钛, foil, thickness 0.5 mm, 99.99% trace metals basis
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钛, sputtering target, diam. × thickness 2.00 in. × 0.25 in., 99.995% trace metals basis
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钛, wire, diam. 0.81 mm, 99.7% trace metals basis
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钛, foil, thickness 0.25 mm, 99.99% trace metals basis
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钛, rod, diam. 6.35 mm, 99.99% trace metals basis
钛, mesh, 100x100mm, nominal aperture 0.19mm, wire diameter 0.23mm, 60x60 wires/inch, open area 20%, twill weave
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钛, foil, thickness 0.127 mm, ≥99.99% trace metals basis
钛, mesh, 100x100mm, nominal aperture 4.3mm, wire diameter 1.5mm, 4.4x4.4 wires/inch, open area 94%, platinized diamond mesh
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钛, wire, diam. 1.0 mm, 99.99% trace metals basis
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钛, sputtering target, diam. × thickness 3.00 in. × 0.125 in., 99.995% trace metals basis
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钛, wire, diam. 0.5 mm, 99.99% trace metals basis
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钛, wire, diam. 2.0 mm, 99.99% trace metals basis
钛, wire reel, 10m, diameter 0.05mm, hard, 99.8%
钛, wire reel, 200m, diameter 0.5mm, as drawn, 99.6+%
钛, tube, 500mm, outside diameter 0.51mm, inside diameter 0.35mm, wall thickness 0.08mm, annealed, 99.6+%
钛, tube, 500mm, outside diameter 0.81mm, inside diameter 0.61mm, wall thickness 0.1mm, as drawn, 99.6+%
钛, tube, 500mm, outside diameter 1.05mm, inside diameter 0.75mm, wall thickness 0.15mm, annealed, 99.6+%
钛, tube, 500mm, outside diameter 1.6mm, inside diameter 1.2mm, wall thickness 0.2mm, hard, 99.6+%

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