Wafer-scale growth of VO2 thin films using a combinatorial approach.

Nature communications (2015-10-10)
Hai-Tian Zhang, Lei Zhang, Debangshu Mukherjee, Yuan-Xia Zheng, Ryan C Haislmaier, Nasim Alem, Roman Engel-Herbert
RESUMEN

Transition metal oxides offer functional properties beyond conventional semiconductors. Bridging the gap between the fundamental research frontier in oxide electronics and their realization in commercial devices demands a wafer-scale growth approach for high-quality transition metal oxide thin films. Such a method requires excellent control over the transition metal valence state to avoid performance deterioration, which has been proved challenging. Here we present a scalable growth approach that enables a precise valence state control. By creating an oxygen activity gradient across the wafer, a continuous valence state library is established to directly identify the optimal growth condition. Single-crystalline VO2 thin films have been grown on wafer scale, exhibiting more than four orders of magnitude change in resistivity across the metal-to-insulator transition. It is demonstrated that 'electronic grade' transition metal oxide films can be realized on a large scale using a combinatorial growth approach, which can be extended to other multivalent oxide systems.

MATERIALES
Referencia del producto
Marca
Descripción del producto

Sigma-Aldrich
Vanadium, powder, −325 mesh, 99.5% trace metals basis
Sigma-Aldrich
Vanadium, powder, -100 mesh, 99.9% trace metals basis
Sigma-Aldrich
Vanadium, foil, thickness 0.127 mm, 99.7% trace metals basis
Sigma-Aldrich
Vanadium, pieces, 1-3 mm, 99.9% trace metals basis
Sigma-Aldrich
Vanadium, foil, thickness 0.25 mm, 99.7% trace metals basis
Sigma-Aldrich
Vanadium, rod, diam. 6.2 mm, 99.7% trace metals basis
Vanadium, wire reel, 5m, diameter 0.5mm, as drawn, 99.8%
Vanadium, microfoil, disks, 10mm, thinness 0.1μm, specific density 60.8μg/cm2, permanent mylar 3.5μm support, 99.8+%
Vanadium, microfoil, disks, 10mm, thinness 0.25μm, specific density 140.4μg/cm2, permanent mylar 3.5μm support, 99.8+%
Vanadium, microfoil, disks, 10mm, thinness 1.0μm, specific density 611μg/cm2, permanent mylar 3.5μm support, 99.8+%
Vanadium, microfoil, disks, 25mm, thinness 0.1μm, specific density 60.8μg/cm2, permanent mylar 3.5μm support, 99.8+%
Vanadium, microfoil, disks, 25mm, thinness 0.25μm, specific density 140.4μg/cm2, permanent mylar 3.5μm support, 99.8+%
Vanadium, microfoil, disks, 25mm, thinness 1.0μm, specific density 611μg/cm2, permanent mylar 3.5μm support, 99.8+%
Vanadium, wire reel, 0.2m, diameter 0.1mm, as drawn, 99.8%
Vanadium, wire reel, 0.2m, diameter 0.25mm, hard, 99.8%
Vanadium, wire reel, 0.2m, diameter 0.5mm, as drawn, 99.8%
Vanadium, wire reel, 0.2m, diameter 1.0mm, Stress relieved, 99.8%
Vanadium, wire reel, 0.5m, diameter 0.1mm, as drawn, 99.8%
Vanadium, wire reel, 0.5m, diameter 0.25mm, hard, 99.8%
Vanadium, wire reel, 0.5m, diameter 0.5mm, as drawn, 99.8%
Vanadium, wire reel, 0.5m, diameter 1.0mm, Stress relieved, 99.8%
Vanadium, wire reel, 1m, diameter 0.1mm, as drawn, 99.8%
Vanadium, wire reel, 1m, diameter 0.25mm, hard, 99.8%
Vanadium, wire reel, 1m, diameter 0.5mm, as drawn, 99.8%
Vanadium, wire reel, 1m, diameter 1.0mm, Stress relieved, 99.8%
Vanadium, wire reel, 2m, diameter 0.1mm, as drawn, 99.8%
Vanadium, wire reel, 2m, diameter 0.25mm, hard, 99.8%
Vanadium, wire reel, 2m, diameter 0.5mm, as drawn, 99.8%
Vanadium, wire reel, 2m, diameter 1.0mm, Stress relieved, 99.8%
Vanadium, wire reel, 5m, diameter 0.1mm, as drawn, 99.8%