Fused-silica focusing lens for deep UV laser processing.

Applied optics (1992-08-01)
T Y Hung, C S Su
ABSTRACT

A simple four-element fused-silica lens is presented that has a focal length of 31.2 mm and a relative aperture of f/1 for use as a focusing lens for deep UV laser processing. The curvature of the lens is designed with a practical design method to match the curvature of existing optical tools. By applying an 8.5-mm beam diameter Nd:YAG laser at a wavelength of 266 nm through the lens, we can easily achieve the percussion drilled into samples of 25-microm-thick tantalum foil with a hole diameter of <6 microm. When the lens and/or the sample is tilted, the shape of the drilled hole is in agreement with the Gaussian beam spot simulation.

MATERIALS
Product Number
Brand
Product Description

Tantalum, foil, 10mm disks, thickness 0.05mm, annealed, 99.9%
Tantalum, foil, 10mm disks, thickness 0.075mm, annealed, 99.9%
Tantalum, foil, 10mm disks, thickness 0.100mm, annealed, 99.9%
Tantalum, foil, 10mm disks, thickness 0.125mm, annealed, 99.9%
Tantalum, foil, 10mm disks, thickness 0.15mm, annealed, 99.9%
Tantalum, foil, 10mm disks, thickness 0.20mm, annealed, 99.9%
Tantalum, foil, 10mm disks, thickness 0.25mm, annealed, 99.9%
Tantalum, foil, 10mm disks, thickness 0.25mm, annealed, 99.99%
Tantalum, foil, 10mm disks, thickness 0.5mm, annealed, 99.9%
Tantalum, foil, 10mm disks, thickness 0.75mm, annealed, 99.9%
Tantalum, foil, 15mm disks, thickness 0.006mm, 99.9%
Tantalum, foil, 15mm disks, thickness 0.0075mm, 99.9%
Tantalum, foil, 15mm disks, thickness 0.009mm, 99.9%
Tantalum, foil, 15mm disks, thickness 0.0125mm, 99.9%
Tantalum, foil, 15mm disks, thickness 0.015mm, 99.9%
Tantalum, foil, 15mm disks, thickness 0.01mm, 99.9%
Tantalum, foil, 15mm disks, thickness 0.025mm, as rolled, 99.9%
Tantalum, foil, 15mm disks, thickness 0.02mm, 99.9%
Tantalum, foil, 15mm disks, thickness 0.034mm, as rolled, 99.9%
Tantalum, foil, 15mm disks, thickness 0.03mm, as rolled, 99.9%
Tantalum, foil, 15mm disks, thickness 0.05mm, annealed, 99.9%
Tantalum, foil, 15mm disks, thickness 0.075mm, annealed, 99.9%
Tantalum, foil, 15mm disks, thickness 0.100mm, annealed, 99.9%
Tantalum, foil, 15mm disks, thickness 0.125mm, annealed, 99.9%
Tantalum, foil, 15mm disks, thickness 0.15mm, annealed, 99.9%
Tantalum, foil, 15mm disks, thickness 0.20mm, annealed, 99.9%
Tantalum, foil, 15mm disks, thickness 0.25mm, annealed, 99.9%
Tantalum, foil, 15mm disks, thickness 0.25mm, annealed, 99.99%
Tantalum, foil, 15mm disks, thickness 0.5mm, annealed, 99.9%
Tantalum, foil, 15mm disks, thickness 0.75mm, annealed, 99.9%

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