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579211

Sigma-Aldrich

Tetrakis(dimethylamido)zirconium(IV)

electronic grade, ≥99.99% trace metals basis

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Synonym(s):
TDMAZ, Tetrakis(dimethylamino)zirconium(IV)
Linear Formula:
[(CH3)2N]4Zr
CAS Number:
Molecular Weight:
267.53
MDL number:
PubChem Substance ID:
NACRES:
NA.23

grade

electronic grade

Assay

≥99.99% trace metals basis

form

solid

reaction suitability

core: zirconium

mp

57-60 °C (lit.)

storage temp.

2-8°C

SMILES string

CN(C)[Zr](N(C)C)(N(C)C)N(C)C

InChI

1S/4C2H6N.Zr/c4*1-3-2;/h4*1-2H3;/q4*-1;+4

InChI key

DWCMDRNGBIZOQL-UHFFFAOYSA-N

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This Item
553131469858669016
assay

≥99.99% trace metals basis

assay

≥99.99% trace metals basis

assay

99.999% trace metals basis

assay

≥99.99% (trace metals analysis)

form

solid

form

liquid

form

liquid

form

solid

mp

57-60 °C (lit.)

mp

-

mp

-

mp

57-60 °C (lit.)

storage temp.

2-8°C

storage temp.

-

storage temp.

-

storage temp.

-

reaction suitability

core: zirconium

reaction suitability

core: zirconium

reaction suitability

core: titanium

reaction suitability

core: zirconium

Application

Tetrakis(dimethylamido) zirconium (IV) may be used as a precursor for atomic layer deposition of zirconium which find applications ranging from gas sensors to high-k dielectrics in microelectronics.

Pictograms

FlameExclamation mark

Signal Word

Danger

Hazard Classifications

Eye Irrit. 2 - Flam. Sol. 1 - Skin Irrit. 2 - STOT SE 3 - Water-react 2

Target Organs

Respiratory system

Supplementary Hazards

Storage Class Code

4.3 - Hazardous materials, which set free flammable gases upon contact with water

WGK

WGK 3

Flash Point(F)

No data available

Flash Point(C)

No data available

Personal Protective Equipment

dust mask type N95 (US), Eyeshields, Gloves

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Electrochemical and Solid-State Letters, 12.4, K25-K28 (2009)
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