n20/D 1.407 (lit.)
125 °C (lit.)
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Acute Tox. 3 Dermal - Acute Tox. 4 Inhalation - Acute Tox. 4 Oral - Aquatic Chronic 3 - Flam. Liq. 2 - Skin Corr. 1B
3 - Flammable liquids
52.5 °F - closed cup
11.4 °C - closed cup
atomic layer deposition (ALD), microelectronics, Mo:Al2O3 films, nanocomposite coating, photovoltaics, semiconductor devices, W:Al2O3 films, composite films, layer-by-layer
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