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| Size/SKU | Availability | Price |
|---|---|---|
5 g | Available to ship TODAYfromMILWAUKEE | $125.00 |
25 g | Available to ship TODAYfromMILWAUKEE | $461.00 $345.75 |
About This Item
Linear Formula:
((CH3)3CO)3SiOH
CAS Number:
Molecular Weight:
264.43
NACRES:
NA.23
PubChem Substance ID:
UNSPSC Code:
12352103
MDL number:
$125.00
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Quality Segment
assay
99.999%
form
solid
bp
205-210 °C (lit.)
mp
63-65 °C (lit.)
SMILES string
CC(C)(C)O[Si](O)(OC(C)(C)C)OC(C)(C)C
InChI
1S/C12H28O4Si/c1-10(2,3)14-17(13,15-11(4,5)6)16-12(7,8)9/h13H,1-9H3
InChI key
HLDBBQREZCVBMA-UHFFFAOYSA-N
General description
Tris(tert-butoxy)silanol can react with various metal alkyl amides to act as precursors for vapor deposition metal silicates. It also acts as a suitable precursor for deposition of silica.
Application
Tris(tert-alkoxy)silanols reacts with tetrakis(dimethylamino)-hafnium vapor(Hf(N(CH3)2)4) for vapor phase deposition of hafnium silicate glass films. Tris(tert-butoxy)silanol is used for atomic layer deposition (ALD) of highly conformal layers of amorphous silicon dioxide and aluminum oxide nanolaminates.
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This Item | |||
|---|---|---|---|
| description 99.999% | description 97% | description ≥99.99% | description ≥95% |
| form solid | form liquid | form liquid | form liquid |
| assay 99.999% | assay 97% | assay ≥99.99% | assay ≥95% |
| mp 63-65 °C (lit.) | mp - | mp - | mp - |
| bp 205-210 °C (lit.) | bp 73 °C/5 mmHg (lit.) | bp 96-99 °C/2-3 mmHg (lit.) | bp - |
| Quality Level 100 | Quality Level 100 | Quality Level 100 | Quality Level - |
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Storage Class
11 - Combustible Solids
wgk
WGK 3
flash_point_f
Not applicable
flash_point_c
Not applicable
ppe
Eyeshields, Gloves, type N95 (US)
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