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651842

Sigma-Aldrich

Gold etchant, nickel compatible

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About This Item

MDL number:
UNSPSC Code:
12352300
NACRES:
NA.23

vapor density

9 (vs air)

Quality Level

vapor pressure

0.3 mmHg ( 15 °C)

composition

volatiles, 50-80%

bp

100 °C/1 atm

solubility

H2O: miscible at 20 °C

General description

Nickel compatible gold etchant is an etching solution that can be used in the removal of the gold layer from the surface. Compatibility of gold etchants with nickel allows it to be utilized in applications where nickel is used as a dominant material in the fabrication of micro-electro-mechanical systems (MEMS).

Application

Elective general-purpose etchant for gold. Compatible with negative and positive photoresists.

Features and Benefits

Etching readily controlled with minimum undercutting. Room temperature operated. Cyanide-free, no attack of nickel films.

pictograms

Health hazard

signalword

Danger

hcodes

Hazard Classifications

STOT RE 1 Oral

target_organs

Thyroid

wgk_germany

WGK 3

flash_point_f

Not applicable

flash_point_c

Not applicable

ppe

Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter


Certificates of Analysis (COA)

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A monolithic micro-optical interferometer deep etched into fused silica
Weigel C, et al.
Microelectronic Engineering, 174(5), 40-45 (2017)
Micro-elastometry on whole blood clots using actuated surface-attached posts (ASAPs)
Judith RM, et al.
Lab on a chip, 15(5), 1385-1393 (2015)
Determination of young's modulus of electrochemically co-deposited Ni-Al2O3 nanocomposite
Wei X, et al.
Materials Letters, 62(12-13), 1916-1918 (2008)

Protocols

Photoresist kit offers pre-weighed chemical components for lithographic processes, with separate etchants for various substrate choices.

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