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760404

Tantalum(V) ethoxide

packaged for use in deposition systems

Synonym(s):
PET, Pentaethoxytantalum, Pentaethyl tantalate, Tantalum pentaethoxide
Linear Formula:
Ta(OC2H5)5
CAS Number:
Molecular Weight:
406.25
Beilstein:
3678999
EC Number:
MDL number:
PubChem Substance ID:
NACRES:
NA.23

form

liquid

refractive index

n20/D 1.487 (lit.)

bp

155 °C/0.01 mmHg (lit.)

mp

21 °C (lit.)

density

1.566 g/mL at 25 °C (lit.)

SMILES string

CCO[Ta](OCC)(OCC)(OCC)OCC

InChI

1S/5C2H5O.Ta/c5*1-2-3;/h5*2H2,1H3;/q5*-1;+5

InChI key

HSXKFDGTKKAEHL-UHFFFAOYSA-N

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This Item
339113697222668990
Tantalum(V) ethoxide packaged for use in deposition systems

760404

Tantalum(V) ethoxide

Tantalum(V) ethoxide 99.98% trace metals basis

Sigma-Aldrich

339113

Tantalum(V) ethoxide

Tantalum(V) oxide −60 mesh, 99.5%

Sigma-Aldrich

697222

Tantalum(V) oxide

refractive index

n20/D 1.487 (lit.)

refractive index

n20/D 1.487 (lit.)

refractive index

-

refractive index

-

bp

155 °C/0.01 mmHg (lit.)

bp

155 °C/0.01 mmHg (lit.)

bp

-

bp

-

mp

21 °C (lit.)

mp

21 °C (lit.)

mp

-

mp

-

density

1.566 g/mL at 25 °C (lit.)

density

1.566 g/mL at 25 °C (lit.)

density

8.2 g/mL at 25 °C (lit.)

density

1.252 g/mL at 25 °C (lit.)

Application

Tantalum(V) ethoxide precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods

Pictograms

Flame

Signal Word

Warning

Hazard Statements

Hazard Classifications

Flam. Liq. 3

Storage Class Code

3 - Flammable liquids

WGK

WGK 1

Flash Point(F)

84.2 °F - closed cup

Flash Point(C)

29 °C - closed cup


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