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Nanolithography. Large-scale nanoshaping of ultrasmooth 3D crystalline metallic structures.

Science (New York, N.Y.) (2014-12-17)
Huang Gao, Yaowu Hu, Yi Xuan, Ji Li, Yingling Yang, Ramses V Martinez, Chunyu Li, Jian Luo, Minghao Qi, Gary J Cheng
ABSTRACT

We report a low-cost, high-throughput benchtop method that enables thin layers of metal to be shaped with nanoscale precision by generating ultrahigh-strain-rate deformations. Laser shock imprinting can create three-dimensional crystalline metallic structures as small as 10 nanometers with ultrasmooth surfaces at ambient conditions. This technique enables the successful fabrications of large-area, uniform nanopatterns with aspect ratios as high as 5 for plasmonic and sensing applications, as well as mechanically strengthened nanostructures and metal-graphene hybrid nanodevices.

MATERIALS
Product Number
Brand
Product Description

Sigma-Aldrich
Gold, foil, thickness 0.1 mm, 99.99% trace metals basis
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Sigma-Aldrich
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Gold, tube, 10mm, outside diameter 0.15mm, inside diameter 0.05mm, wall thickness 0.05mm, as drawn, 99.95%
Gold, tube, 50mm, outside diameter 1.0mm, inside diameter 0.7mm, wall thickness 0.15mm, as drawn, 99.95%
Gold, rod, 10mm, diameter 5.0mm, as drawn, 99.95%
Gold, tube, 200mm, outside diameter 0.3mm, inside diameter 0.2mm, wall thickness 0.05mm, as drawn, 99.95%
Gold, tube, 50mm, outside diameter 1.60mm, inside diameter 0.6mm, wall thickness 0.5mm, as drawn, 99.95%
Gold, tube, 50mm, outside diameter 3.0mm, inside diameter 2.8mm, wall thickness 0.10mm, as drawn, 99.95%
Gold, insulated wire, 5m, conductor diameter 0.05mm, insulation thickness 0.007mm, polyimide insulation, 99.99%
Gold, microleaf disks, 10mm, thinness 0.25μm, specific density 483μg/cm2, removable support, 99.99+%
Gold, insulated wire, 0.5m, conductor diameter 0.05mm, insulation thickness 0.009mm, PTFE (polytetrafluoroethylene) insulation, 99.99%
Gold, insulated wire, 0.1m, conductor diameter 0.10mm, insulation thickness 0.013mm, PTFE (polytetrafluoroethylene) insulation, 99.99%
Gold, rod, 100mm, diameter 1.6mm, as drawn, 99.95%
Gold, insulated wire, 2m, conductor diameter 0.10mm, insulation thickness 0.013mm, PTFE (polytetrafluoroethylene) insulation, 99.99%
Gold, insulated wire, 1m, conductor diameter 0.10mm, insulation thickness 0.013mm, PTFE (polytetrafluoroethylene) insulation, 99.99%
Gold, insulated wire, 0.5m, conductor diameter 0.10mm, insulation thickness 0.013mm, PTFE (polytetrafluoroethylene) insulation, 99.99%
Gold, insulated wire, 5m, conductor diameter 0.125mm, insulation thickness 0.014mm, polyester insulation, 99.99%
Gold, insulated wire, 1m, conductor diameter 0.125mm, insulation thickness 0.014mm, polyester insulation, 99.99%
Gold, insulated wire, 0.2m, conductor diameter 0.025mm, insulation thickness 0.002mm, PTFE (polytetrafluoroethylene) insulation, 99.99%
Gold, insulated wire, 5m, conductor diameter 0.025mm, insulation thickness 0.005mm, polyester insulation, 99.99%
Gold, insulated wire, 1m, conductor diameter 0.05mm, insulation thickness 0.009mm, PTFE (polytetrafluoroethylene) insulation, 99.99%
Gold, microfoil, disks, 10mm, thinness 0.25μm, specific density 483μg/cm2, permanent mylar 3.5μm support, 99.99+%
Gold, insulated wire, 0.2m, conductor diameter 0.125mm, insulation thickness 0.016mm, PTFE (polytetrafluoroethylene) insulation, 99.99%