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667471 Sigma-Aldrich

Anisotropic Silicon <100> Etchant

Synonym: Preferential Silicon Etchant, Silicon 100 Etch, Silicon Preferential Etch

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Properties

Related Categories Electronic Chemicals, Etchants, Materials Science, Micro/NanoElectronics
Quality Level   100
refractive index   n20/D 1.484
bp   >240 °C
density   1.001 g/mL at 25 °C

Description

General description

Ethylenediamine based - for < 100 > crystal orientation

Packaging

500 mL in glass bottle

Application

Etch rate ~80microns/hour at @ 100 °C. Etches cleanly with only a deionized water rinse needed. Will not etch Au or Ta.

Safety & Documentation

Safety Information

Signal word 
Danger
RIDADR 
UN 2922 6.1(8) / PGIII
WGK Germany 
WGK 2
Flash Point(F) 
109.9 °F - Not applicable
Flash Point(C) 
43.3 °C - Not applicable

Documents

Certificate of Analysis (COA)

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Certificate of Origin (COO)

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Protocols & Articles
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