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453153 Sigma-Aldrich

Tetrakis(diethylamido)zirconium(IV)

electronic grade, ≥99.99% trace metals basis

Synonym: Tetrakis(diethylamido)zirconium, Tetrakis(diethylamino)zirconium, Zirconium tetrakis(diethylamide)

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Properties

Related Categories CVD and ALD Precursors by Metal, Materials Science, Micro/NanoElectronics, Vapor Deposition Precursors, Zirconium More...
grade   electronic grade
InChI Key   GOVWJRDDHRBJRW-UHFFFAOYSA-N
assay   ≥99.99% trace metals basis
form   liquid
refractive index   n20/D 1.51 (lit.)
bp   128 °C/0.05 mmHg (lit.)
density   1.026 g/mL at 25 °C (lit.)
storage temp.   2-8°C

Description

General description

Atomic number of base material: 40 Zirconium

Packaging

5 mL in ampule

Safety & Documentation

Safety Information

Symbol 
Signal word 
Danger
Hazard statements 
Supplemental Hazard Statements 
Reacts violently with water.
RIDADR 
UN3398 - DOT UN3399 class 4.3 - PG 2 - Organometallic substance, liquid, water-reactive, HI: all (not BR)
WGK Germany 
3
Flash Point(F) 
53.6 °F
Flash Point(C) 
12 °C
Protocols & Articles

Articles

FePt Nanogranular Films for High Density Heat-assisted Magnetic Recording

Kazuhiro Hono, National Institute for Materials Research, Tsukuba 305-0047, Japan Email: kazuhiro.hono@nims.go.jp
Keywords: Deposition, Nucleic acid annealing

High Purity Metalorganic Precursors for CPV Device Fabrication

Thin film photovoltaic devices have become increasingly important in efficiently harnessing solar energy to meet consumer demand. Conventional crystalline silicon solar cells have demonstrated remark...
Ravi Kanjolia
Material Matters Volume 5 Article 4
Keywords: Absorption, Chemical vapor deposition, Degradations, Deposition, Mass spectrometry, Nuclear magnetic resonance spectroscopy, Purification, Semiconductor, Solar cells, Spectroscopy, Tissue microarrays, Vaporization

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