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473537 Aldrich

Tetrakis(ethylmethylamido)titanium(IV)

electronic grade, ≥99.99%

Synonym: Tetrakis(ethylmethylamino)titanium(IV)

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Properties

Related Categories CVD and ALD Precursors by Metal, Materials Science, Micro/NanoElectronics, Titanium, Vapor Deposition Precursors More...
grade   electronic grade
InChI Key   LNKYFCABELSPAN-UHFFFAOYSA-N
assay   ≥99.99%
form   liquid
bp   80 °C/0.1 mmHg(lit.)
density   0.923 g/mL at 25 °C(lit.)
storage temp.   2-8°C

Description

Application

Precursor to titanium nitride (TiN) thin films by organometallic chemical vapor deposition (OMCVD).

General description

Atomic number of base material: 22 Titanium

Other Notes

Please inquire for bulk quantity, pricing, and packaging options.

Packaging

5 g in ampule

Price and Availability

Safety & Documentation

Safety Information

Symbol 
Signal word 
Danger
Hazard statements 
Precautionary statements 
Supplemental Hazard Statements 
Reacts violently with water.
RIDADR 
UN3398 - DOT UN3399 class 4.3 - PG 1 - Organometallic substance, liquid, water-reactive, HI: all (not BR)
WGK Germany 
3
Flash Point(F) 
35.6 °F
Flash Point(C) 
2 °C
Protocols & Articles

Articles

A Review of Mesoporous TiO2 Thin Films

Jinshu Wang*, Junshu Wu, Hongyi Li The Key Lab of Advanced Functional Materials, Ministry of Education China, School of Materials Science and Engineering, Beijing University of Technology, Beijing 10...
Keywords: Adsorption, Building blocks, Catalysis, Ceramics, Condensations, Cosmetics, Degradations, Diffraction, Eliminations, Evaporation, Materials Science, Oxidations, Polymerization reactions, Semiconductor, Separation, Sol-gel

Atomic Layer Deposition of Nanomaterials for Li-Ion Batteries, Fuel Cells, and Solar Cells

Erwin Kessels,* Harm Knoops, Matthieu Weber, Adrie Mackus, and Mariadriana Creatore Department of Applied Physics, Eindhoven University of Technology P.O. Box 513, 5600 MB Eindhoven, The Netherlands ...
Keywords: Adhesion, Atomic layer deposition, Building blocks, Catalysis, Chemical vapor deposition, Crystallization, Deposition, Diffusion, Microscopy, Nanomaterials, Nanotubes, Nucleic acid annealing, Oxidations, Recombination, Reductions, Renewable energy, Scanning electron microscopy, Solar cells

High Purity Metalorganic Precursors for CPV Device Fabrication

Thin film photovoltaic devices have become increasingly important in efficiently harnessing solar energy to meet consumer demand. Conventional crystalline silicon solar cells have demonstrated remark...
Ravi Kanjolia
Material Matters Volume 5 Article 4
Keywords: Absorption, Chemical vapor deposition, Degradations, Deposition, Mass spectrometry, Nuclear magnetic resonance spectroscopy, Purification, Semiconductor, Solar cells, Spectroscopy, Tissue microarrays, Vaporization

Mesoporous Titanium Dioxide Thin Films

Titanium dioxide (TiO2) is an important n-type semiconducting material that shows interesting characteristics such as photoswitchable surface wettability, high photocatalytic activity, bistable elect...
Jinshu Wang, Junshu Wu, Hongyi Li
Material Matters, Volume 7, Number 2, 2–6
Keywords: Adsorption, Building blocks, Catalysis, Ceramics, Condensations, Cosmetics, Degradations, Diffraction, Eliminations, Evaporation, Materials Science, Oxidations, Polymerization reactions, Semiconductor, Separation, Sol-gel

Surface-enhanced Solar Energy Conversion Systems Using Gold and Silver Nanoparticles

Sustainable, environment-friendly, and clean energy sources with sufficiently high production efficiency for practical application are highly desirable to meet the energy challenge of the 21st centur...
Shanlin Pan and Arunava Gupta
Material Matters, 2012 v7, n4
Keywords: Absorption, Applications, Catalysis, Chemical vapor deposition, Degradations, Deposition, Diffusion, Electronics, Help, Organic electronics, Photovoltaics, Recombination, Renewable energy, Search, Semiconductor, Separation, Solar cells, Spectra, Support, Type

Peer-Reviewed Papers
15

References

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