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  • 668990 - Tris(diethylamido)(tert-butylimido)tantalum(V)

668990 Sigma-Aldrich


packaged for use in deposition systems

Synonym: TBTDET, Tris(diethylamino)(tert-butylimino)tantalum(V)

  • CAS Number 169896-41-7

  • Linear Formula (CH3)3CNTa(N(C2H5)2)3

  • Molecular Weight 468.46

  •  MDL number MFCD02684506

  •  PubChem Substance ID 24885014

  •  NACRES NA.23



Related Categories 73: Tantalum, CVD and ALD Precursors Packaged for Deposition Systems, CVD and ALD Precursors by Metal, Materials Science, Micro/NanoElectronics,
Quality Level   100
assay   ≥99.99% (trace metals analysis)
form   liquid
reaction suitability   core: tantalum
density   1.252 g/mL at 25 °C (lit.)
SMILES string   CCN(CC)[Ta](=NC(C)(C)C)(N(CC)CC)N(CC)CC
InChI   1S/C4H9N.3C4H10N.Ta/c1-4(2,3)5;3*1-3-5-4-2;/h1-3H3;3*3-4H2,1-2H3;/q;3*-1;+3


General description

Atomic number of base material: 73 Tantalum


Precursors Packaged for Depositions Systems


10 g in stainless steel cylinder

Safety & Documentation

Safety Information

Signal word 
Hazard statements 
Supplemental Hazard Statements 
UN3398 - DOT UN3399 class 4.3 - PG 2 - Organometallic substance, liquid, water-reactive, HI: all (not BR)
WGK Germany 
Flash Point(F) 
114.8 °F - closed cup
Flash Point(C) 
46 °C - closed cup


Certificate of Analysis (COA)

Please Enter a Lot Number

Frequently Asked Questions

Which document(s) contains shelf-life or expiration date information for a given product?
If available for a given product, the recommended re-test date or the expiration date can be found on the Certificate of Analysis.
How do I get lot-specific information or a Certificate of Analysis?
The lot specific COA document can be found by entering the lot number above under the "Documents" section.
How do I find price and availability?
There are several ways to find pricing and availability for our products. Once you log onto our website, you will find the price and availability displayed on the product detail page. You can contact any of our Customer Sales and Service offices to receive a quote. USA customers: 1-800-325-3010 or view local office numbers.
What is the Department of Transportation shipping information for this product?
Transportation information can be found in Section 14 of the product's (M)SDS.To access the shipping information for this material, use the link on the product detail page for the product.
Can the empty deposition cylinders be refilled?
Yes, we are able to refill these cylinders through our SAFC Hitech group. Please contact our Technical Service department by emailat techserv@sial.com, and they will forward you to the appropriate SAFC Hitech representative for a quote.
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Protocols & Articles


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Nanowire Synthesis: From Top-Down to Bottom-Up

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