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668990 Sigma-Aldrich

Tris(diethylamido)(tert-butylimido)tantalum(V)

packaged for use in deposition systems

Synonym: TBTDET, Tris(diethylamino)(tert-butylimino)tantalum(V)

  • CAS Number 169896-41-7

  • Linear Formula (CH3)3CNTa(N(C2H5)2)3

  • Molecular Weight 468.46

  •  MDL number MFCD02684506

  •  PubChem Substance ID 24885014

  •  NACRES NA.23

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Properties

Related Categories 73: Tantalum, CVD and ALD Precursors Packaged for Deposition Systems, CVD and ALD Precursors by Metal, Materials Science, Micro/NanoElectronics,
Quality Level   100
assay   ≥99.99% (trace metals analysis)
form   liquid
reaction suitability   core: tantalum
density   1.252 g/mL at 25 °C (lit.)
SMILES string   CCN(CC)[Ta](=NC(C)(C)C)(N(CC)CC)N(CC)CC
InChI   1S/C4H9N.3C4H10N.Ta/c1-4(2,3)5;3*1-3-5-4-2;/h1-3H3;3*3-4H2,1-2H3;/q;3*-1;+3
InChI key   YYKBKTFUORICGA-UHFFFAOYSA-N

Description

General description

Atomic number of base material: 73 Tantalum

Application

Precursors Packaged for Depositions Systems

Packaging

10 g in stainless steel cylinder

Safety & Documentation

Safety Information

Symbol 
Signal word 
Danger
Hazard statements 
Supplemental Hazard Statements 
EUH014
RIDADR 
UN3398 - DOT UN3399 class 4.3 - PG 2 - Organometallic substance, liquid, water-reactive, HI: all (not BR)
WGK Germany 
WGK 3
Flash Point(F) 
114.8 °F - closed cup
Flash Point(C) 
46 °C - closed cup

Documents

Certificate of Analysis (COA)

Please Enter a Lot Number

Frequently Asked Questions

Which document(s) contains shelf-life or expiration date information for a given product?
If available for a given product, the recommended re-test date or the expiration date can be found on the Certificate of Analysis.
How do I get lot-specific information or a Certificate of Analysis?
The lot specific COA document can be found by entering the lot number above under the "Documents" section.
How do I find price and availability?
There are several ways to find pricing and availability for our products. Once you log onto our website, you will find the price and availability displayed on the product detail page. You can contact any of our Customer Sales and Service offices to receive a quote. USA customers: 1-800-325-3010 or view local office numbers.
What is the Department of Transportation shipping information for this product?
Transportation information can be found in Section 14 of the product's (M)SDS.To access the shipping information for this material, use the link on the product detail page for the product.
Can the empty deposition cylinders be refilled?
Yes, we are able to refill these cylinders through our SAFC Hitech group. Please contact our Technical Service department by emailat techserv@sial.com, and they will forward you to the appropriate SAFC Hitech representative for a quote.
My question is not addressed here, how can I contact Technical Service for assistance?
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Protocols & Articles

Articles

FePt Nanogranular Films for High Density Heat-assisted Magnetic Recording

Kazuhiro Hono, National Institute for Materials Research, Tsukuba 305-0047, Japan Email: kazuhiro.hono@nims.go.jp
Keywords: Deposition, Nucleic acid annealing

High Purity Metalorganic Precursors for CPV Device Fabrication

Thin film photovoltaic devices have become increasingly important in efficiently harnessing solar energy to meet consumer demand. Conventional crystalline silicon solar cells have demonstrated remark...
Ravi Kanjolia
Material Matters Volume 5 Article 4
Keywords: Absorption, Chemical vapor deposition, Degradations, Deposition, Mass spectrometry, Nuclear magnetic resonance spectroscopy, Purification, Semiconductor, Solar cells, Spectroscopy, Tissue microarrays, Vaporization

Nanocomposite Coatings with Tunable Properties Prepared by Atomic Layer Deposition

Nanocomposite coatings, comprised of a precisely blended mixture of components, have diverse applications in microelectronics, optics, sensors, and solid-state detectors. By varying the composition o...
Keywords: Absorption, Amplification, Atomic layer deposition, Chromatin immunoprecipitation, Deposition, Detection methods, Diffraction, Diffusion, Elemental analysis, Exothermic, Infrared spectroscopy, Microelectronics, Microscopy, Reductions, Scanning electron microscopy, Semiconductor, Spectroscopy, Tissue microarrays, Transmission electron microscopy

Nanowire Synthesis: From Top-Down to Bottom-Up

David J. Hill, James F. Cahoon* Department of Chemistry, University of North Carolina at Chapel Hill, USA *Email: jfcahoon@unc.edu
David J. Hill, James F. Cahoon*
Material Matters, 2017, 12.1
Keywords: Absorption, Catalysis, Chemical vapor deposition, Deposition, Electronics, Melting, Microelectronics, Nanomaterials, Redox Reactions, Reductions, Semiconductor

The Savannah ALD System - An Excellent Tool for Atomic Layer Deposition

Atomic Layer Deposition (ALD) is a coating technology that allows perfectly conformal deposition onto complex 3D surfaces. The reason for this uniform coating lies in the saturative chemisorption of ...
Dr. Douwe Monsma, Dr. Jill Becker
Material Matters 2006, 1.3, 5.
Keywords: Applications, Atomic layer deposition, Automotive, Catalysis, Ceramics, Chemical vapor deposition, Deposition, Electronics, Infrared spectroscopy, Ion Exchange, Nanomaterials, Semiconductor, Solar cells, Tissue microarrays

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